A mems electromagnetic energy channeling device applied to a fuze and a preparation method thereof
An electromagnetic energy and device technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, semiconductor/solid-state device components, fuzes, etc. Component and circuit damage, etc., to solve size constraints and improve safety performance
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[0035] The present invention will be further elaborated below through specific embodiments in conjunction with the accompanying drawings.
[0036] Such as figure 1 , 2As shown in and 3, the MEMS electromagnetic energy channeling device applied to the fuze of the present embodiment includes: an insulating substrate 1, an electromagnetic energy channeling mass block 2, five annular drive electrodes 3, five pairs of electromagnetic energy channeling wires 4, five pairs of electromagnetic energy channels Energy dredging pin 5, thin film absorbing layer 6, electromagnetic energy absorbing layer 7 and encapsulation shell 8; wherein, the electromagnetic energy dredging quality block 2 is arranged in the center of the circular insulating substrate 1, and the electromagnetic energy dredging mass block 2 adopts classification type stacking structure, including upper and lower mass block upper mechanism 21 and mass block lower mechanism 22, which are two concentric cylinders respectivel...
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