Temperature control system and process of polysilicon reduction furnace
A technology of temperature control system and reduction furnace, which is applied in the field of solar photovoltaics, can solve the problems of complicated adjustment of mixed gas inlet temperature, poor operation flexibility of a single reduction furnace, and low utilization rate of reduction heat energy, so as to achieve simple and timely adjustment operation, Improve the utilization rate of reduction heat energy, which is beneficial to the effect of recycling
Active Publication Date: 2022-05-17
MORIMATSU (JIANGSU) HEAVY IND CO LTD
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Problems solved by technology
[0005] One object of the present invention is to propose a polysilicon reduction furnace temperature control system to solve the problems of high equipment cost in the traditional polysilicon manufacturing process, poor operation flexibility of a single reduction furnace, complicated and difficult adjustment of the temperature of the mixed gas entering the furnace, and the utilization of reduction heat energy low rate technical issues
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[0030] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0031] In describing the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device Or elements must have a certain orientation, be constructed and operate in a certain orientation, and thus should not be construed as limiting the invention.
[0032] see figure 1 , The polysilicon reduction furnace temperature control system of an embodiment includes a hydrogen preheater 10 , a mixer 20 , a vaporizat...
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The invention discloses a polysilicon reduction furnace temperature control system and technology. The polysilicon reduction furnace temperature control system includes a hydrogen preheater, a mixer, a vaporization superheater and a reduction furnace. The air inlet of the mixer is connected, the gas-liquid mixture outlet of the mixer is connected with the gas-liquid mixture inlet of the vaporization superheater, the mixed gas outlet of the vaporization superheater is connected with the inlet of the reduction furnace, and the tail gas outlet of the reduction furnace is connected with the vaporization superheater The tail gas inlet of the vaporizer is connected, and the tail gas outlet of the vaporization superheater is connected with the tube-side tail gas inlet of the hydrogen preheater. The above polysilicon reduction furnace temperature control system has the beneficial effects of low equipment cost, high flexibility in the operation of a single reduction furnace, simple and timely adjustment of the temperature of the mixed gas entering the furnace, a high upper limit of temperature adjustment, and a high recovery and utilization rate of reduction heat. Correspondingly, the present invention also provides a polysilicon reduction furnace temperature control process.
Description
technical field [0001] The invention relates to the field of solar photovoltaics, in particular to a polysilicon reduction furnace temperature control system and process. Background technique [0002] The "Siemens improved method" uses hydrogen and trichlorosilane as raw materials to deposit polysilicon on a high-temperature silicon core at a temperature of 1080 ° C to 1100 ° C, and introduces a polysilicon production process of tail gas recovery and hydrogenation of silicon tetrachloride. After several generations of improvement and innovation, it has become the most mature process technology in polysilicon production. Generally, the optimization of the "Siemens improved method" mainly focuses on the following two aspects: First, the reduction reaction is an important part of the Siemens improved method, which has an important impact on the quality and production cost of polysilicon products. Trichlorosilane and hydrogen are used as The raw materials for the reduction reac...
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IPC IPC(8): C01B33/035G05D23/19
CPCC01B33/035G05D23/19Y02P20/129
Inventor 陈宏伟许晟李振星
Owner MORIMATSU (JIANGSU) HEAVY IND CO LTD