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Semiconductor manufacturing equipment, air curtain device, and method for protecting semiconductor elements

A technology for manufacturing equipment and conductor components, which is applied in semiconductor/solid-state device manufacturing, electrical components, conveyor objects, etc., and can solve problems such as unsatisfactory semiconductor manufacturing machines and lithography processes

Active Publication Date: 2021-04-23
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Although the existing semiconductor manufacturing equipment can already meet the above general purpose, these semiconductor manufacturing equipment and lithography process are still not satisfactory in all aspects

Method used

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  • Semiconductor manufacturing equipment, air curtain device, and method for protecting semiconductor elements
  • Semiconductor manufacturing equipment, air curtain device, and method for protecting semiconductor elements
  • Semiconductor manufacturing equipment, air curtain device, and method for protecting semiconductor elements

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Embodiment Construction

[0101] The implementation modes or examples disclosed below are used to illustrate or complete various technical features of the present invention, and the specific embodiments of the described elements and configurations are used to simplify the description of the present invention, so as to make the disclosure more thorough and complete. In order to fully convey the scope of this disclosure to those skilled in the art. Of course, the embodiments of the present disclosure can also be implemented in many different forms, and are not limited to the embodiments described below.

[0102] Spatially relative terms such as "below", "below", "lower", "above", "higher" and similar terms are used in the text below to facilitate the description of an The relationship between an element or feature and another element or feature(s). These spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in ...

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Abstract

A semiconductor manufacturing equipment includes a loading chamber, a clamping device, a driving mechanism and an air curtain device. The loading chamber is configured to store one or more semiconductor devices. The clamping device is configured to clamp semiconductor components. The driving mechanism is connected to the clamping device, and the driving mechanism is configured to drive the clamping device to transport at least one semiconductor element between the loading chamber and a processing chamber. The air curtain device is arranged on the clamping device, and the air curtain device is configured to provide an air flow to form an air curtain adjacent to a surface of the semiconductor device.

Description

technical field [0001] The embodiment of the present invention relates to a semiconductor manufacturing equipment, and in particular to a semiconductor manufacturing equipment and a protection method using an air curtain to protect a semiconductor element. Background technique [0002] In recent years, semiconductor integrated circuits have experienced exponential growth. Technological advances in integrated circuit materials and design have resulted in generations of integrated circuits, with each generation having smaller and more complex circuits than the previous generation. In the process of integrated circuit development, when the geometric size (that is, the smallest element or line that can be produced in the process) shrinks, the functional density (that is, the number of interconnect devices per chip area) ) usually increases. Generally speaking, this size reduction process can provide the benefits of increasing production efficiency and reducing manufacturing co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/677H01L21/687
CPCH01L21/67H01L21/67017H01L21/67784H01L21/687
Inventor 吴旻政廖启宏杨岳霖
Owner TAIWAN SEMICON MFG CO LTD