Flexible sensor and preparation method thereof

A flexible sensor and flexible substrate technology, applied in instruments, ion implantation plating, coatings, etc., can solve the problem of less sensors with harmful signals being realized, and achieve the expansion of electronic skin functions, high switching ratio, and resistance change range. big effect

Pending Publication Date: 2019-07-16
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Currently, sensors for detecting non-noxious signals are developi

Method used

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  • Flexible sensor and preparation method thereof
  • Flexible sensor and preparation method thereof
  • Flexible sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0051] In this embodiment, the flexible sensor structure is as figure 1 As shown, it includes a flexible substrate 1 , an electrode 10 , a liquid metal film 13 , and an encapsulation layer 11 .

[0052] The liquid metal film 13 is located on the flexible substrate 1 and is composed of surface oxidized liquid metal particles.

[0053] The encapsulation layer 11 is located on the surface of the liquid metal film.

[0054] Electrodes are placed on a flexible substrate to monitor electrical signals between regions of the liquid metal film.

[0055] The flexible base 1 is made of self-healing PU material. The encapsulation layer 11 is made of self-healing PU material.

[0056] The electrode is a strip-shaped liquid metal / copper electrode formed by combining liquid metal and micron-sized copper powder. The liquid metal is gallium indium tin alloy, and the weight percentage of each element is: Ga67.5%, In 22.5%, Sn 10% .

[0057] The preparation method of the flexible sensor is as...

Embodiment 2

[0068] In this embodiment, the structure of the flexible sensor is basically the same as that of the flexible sensor in Embodiment 1. The difference is that in order to improve the detection sensitivity to harmful external forces, it can detect not only lateral external forces, but also vertical external forces. In this embodiment, The flexible sensor in is composed of two parts. The structure of the first part is exactly the same as that of the flexible sensor in Embodiment 1. The structure of the second part is obtained by rotating the flexible sensor structure in Embodiment 1 by 90° clockwise. The first part and the second Partially stacked, a flexible sensor is obtained.

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Abstract

The invention provides a flexible sensor and a preparation method thereof. The flexible sensor comprises a flexible substrate, electrodes, a liquid metal film and a flexible package layer; the liquidmetal film is located on the flexible substrate and composed of liquid metal particles with the oxidized surfaces; the flexible package layer is located on the surface of the liquid metal film; the electrodes are located on the flexible substrate and used for monitoring an electric signal in a certain area of the liquid metal film; and under the effect of external force, the resistance between theelectrodes is changed from the high resistance into the low resistance, and the external force is judged to be harmful external force. The flexible senor can sense the outside harmful external force,and the function of electronic skin can be expanded by integrating the sensor in the electronic skin.

Description

technical field [0001] The invention relates to the technical field of flexible electronics, in particular to a flexible sensor and a preparation method thereof Background technique [0002] With the development of industries such as robots and intelligent prosthetics, there is an increasing demand for highly flexible human skin-like electronic skins. At present, people have developed a series of flexible sensing elements for electronic skin, such as sensing elements for signals such as pressure, temperature, and stretching. The integration and functional complexity of electronic skin are gradually improving. [0003] People have been designing electronic skins by imitating human skin. The external signals received by human skin can be divided into two categories, non-harmful signals that do not damage the skin structure and noxious signals that damage the skin structure. A large number of sensors for detecting harmless signals are distributed in the dermis, while a large ...

Claims

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Application Information

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IPC IPC(8): G01L1/20G01L1/22C23C14/58C23C14/20
CPCC23C14/20C23C14/5853G01L1/205G01L1/2287
Inventor 刘宜伟李法利李润伟
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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