Silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment

Abstract

The invention discloses a silicon micro-resonant accelerometer temperature compensation algorithm based on structure compensation parameter adjustment. The capacitance voltage gain coefficient of a silicon micro-resonant accelerometer interface circuit is derived by a formula and is converted to a conversion coefficient of amplitude to output voltage of the silicon micro-resonant accelerometer, and the sensitivity of the capacitance voltage gain coefficient to temperature is given; an automatic gain control circuit stabilizes the amplitude of a resonant beam of the silicon micro-resonant accelerometer to the amplitude driven under given reference voltage, and when the capacitance voltage gain coefficient of the silicon micro-resonant accelerometer interface circuit changes along with the temperature and the temperature changes, a peripheral control circuit executes influences on the resonant frequency, and the sensitivity of the resonant frequency and the temperature is obtained; and through proper setting of temperature compensation structure parameters of the resonant structure, the target of suppressing drift of the frequency along with the temperature is achieved. No additionalsensor is needed for temperature compensation, the cost is low, no other influence quantity is introduced, and the compensation method is accurate and reliable.

Description

technical field [0001] The invention relates to the technical field of micro-inertial systems, in particular to a silicon micro-resonance accelerometer temperature compensation algorithm based on adjusting structure compensation parameters. Background technique [0002] Accelerometers are one of the most widely used sensors, and micro-accelerometers using MEMS technology have been used in all walks of life due to their small size, low power consumption, and long life. Accelerometers with higher performance are used in advanced weapons such as missile boosting and missile guidance. Among them, the silicon microresonant accelerometer has the potential advantages of high precision and has become a research hotspot. The silicon microresonant accelerometer reflects the change of acceleration by detecting the change of the resonant frequency of the resonant beam. In order to suppress the interference of common mode signals such as temperature and vibration, its structure mainly a...

AI Technical Summary

Problems solved by technology

Although the differential structure can improve the performance of the resonant accelerometer theoretically, due to the immaturity of domestic silicon processing technology, device level packaging technology, bonding technology between structures and other processes, the asymmetry of the upper and lower resonators , so that the temperature drift coefficient is different, and the temperature drift still exists after the differential output

Since the change of temperature will not only affect the change of material parameters, structure size and residual stress, but also affect the peripheral control circuit

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