Surface acoustic wave RFID sensor for chemical detection and (BIO)molecular diagnostics

Abstract

The present application describes embodiments of a radio-frequency identification (RFID) sensor based on a combination of a surface acoustic wave (SAW) transducer and two-dimensional electron gas (2DEG) or two-dimensional hole gas (2DHG) conducting structure, and its use in chemical detection and (bio) molecular diagnostics. The SAW RFID sensor chip contains a piezoelectric substrate, on which a multilayer heterojunction structure is deposited. The heterojunction structure comprises at least two layers, a buffer layer and a barrier layer, wherein both layers are grown from III-V single-crystalline or polycrystalline semiconductor materials, such as GaN/AlGaN. Interdigitated transducers (IDTs) transducing SAWs are installed on top of the barrier layer. A 2DEG or 2DHG conducting channel is formed at the interface between the buffer and barrier layers and provides electron or hole current in the system between the non-ohmic (capacitively-coupled) source and drain contacts connected to theformed channel.

Description

technical field [0001] Generally, the present application relates to the field of electronic sensors based on surface acoustic wave (SAW) transducers. In particular, the application relates to GaN / AlGaN based zero power SAW RFID sensors and their applications in chemical detection and (bio)molecular diagnostics. Background technique [0002] Chemosensing may be the most primitive form of feeling to have emerged in the evolution of life. Without chemical sensing, life might not exist on Earth. They are used to detect nutrients, avoid threats, find mates, and various forms of communication and socialization between animals. [0003] The advent of artificial sensors has created a plethora of problems in the field of chemical detection and identification, with applications in food quality and contamination control, chemical threat detection, health monitoring, robotic control, and even odor and taste synthesis. Efficient algorithms are needed to address the many challenges fa...

AI Technical Summary

Problems solved by technology

In addition to the previously mentioned notes, the cost and organizational complexity of performing a large number of PCR reactions for downstream microarray applications makes this option a viable but unattractive option

This limitation severely reduces the practicability of this technology and hinders the continued development of downstream applications

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