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Method and system for producing purified aqueous hydrogen peroxide solution

A technology of hydrogen peroxide and a manufacturing method, applied in chemical instruments and methods, peroxide/peroxyhydrate/peroxyacid/superoxide/ozone, separation method, etc., can solve the problem of multiple impurities and low purity and other problems to achieve the effect of improving stability

Pending Publication Date: 2019-08-13
MITSUBISHI GAS CHEM CO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The crude aqueous hydrogen peroxide solution produced by the anthraquinone method contains more impurities and low purity

Method used

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  • Method and system for producing purified aqueous hydrogen peroxide solution
  • Method and system for producing purified aqueous hydrogen peroxide solution
  • Method and system for producing purified aqueous hydrogen peroxide solution

Examples

Experimental program
Comparison scheme
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Embodiment

[0061] Specific examples of the present invention will be described. However, the present invention is not limited to the examples described here.

[0062] Figure 4 The manufacturing system of the purified hydrogen peroxide aqueous solution of an Example is shown. Figure 5 A production system of a comparative example is shown. The specifications of each element device shown in these figures are as follows.

[0063] Cyclone separator (gas-liquid separator):

[0064] Standard Cyclone Separator as described in Perry's Chemical Engineer's Handbook

[0065] Cyclone separator diameter Dc 35mm

[0066] Distillation column:

[0067] Tower diameter 55mm

[0068] Filler magnetic Raschig ring (diameter 6mm, filling height 350mm)

[0069] exist Figure 4 In the refining and concentrating facility shown, a crude hydrogen peroxide aqueous solution raw material having a hydrogen peroxide concentration of 30.8 wt% is supplied to the line 11A at a flow rate of 414.3 g / h, and is vapo...

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Abstract

Provided are a method and system for efficiently producing a purified aqueous hydrogen peroxide solution having a high purity. This method for producing a purified aqueous hydrogen peroxide solution comprises: step A for vaporizing a raw material containing a crude aqueous hydrogen peroxide solution; step B for condensing at least a portion of the gas and liquid obtained in step A, and separatingthe gas and liquid into a gas phase and a liquid phase; and step C for returning, into the raw material, at least a portion of a separation liquid which is the separated liquid phase, wherein step C further includes step D for adjusting the concentration of hydrogen peroxide in the separation liquid.

Description

technical field [0001] The present invention relates to a production method and production system for a purified aqueous hydrogen peroxide solution requiring high purity, for example, for use in the electronics industry. Background technique [0002] Hydrogen peroxide is produced industrially by the auto-oxidation of anthraquinone. However, a high-purity hydrogen peroxide aqueous solution is required, for example, for cleaning agents and etching solutions in the field of semiconductor manufacturing. The crude aqueous hydrogen peroxide solution produced by the anthraquinone method contains more impurities and has low purity. Therefore, in order to be used, for example, in the electronics industry, it is necessary to further refine and concentrate the crude hydrogen peroxide aqueous solution produced by the anthraquinone method to improve the purity. [0003] In the prior art, various methods have been proposed as methods for purifying and concentrating crude hydrogen peroxi...

Claims

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Application Information

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IPC IPC(8): C01B15/013B01D1/00B01D3/14B01J39/04B01J41/04B01J47/04
CPCB01J39/04B01J41/04B01J47/04C01B15/013B01D3/143B01D5/006B01D1/0082B01D1/00B01D3/14
Inventor 茂田耕平栉田泰宏山本哲也松浦慎一郎池田英俊
Owner MITSUBISHI GAS CHEM CO INC