Multilayer thick gas electron multiplier for suppressing charging effect and preparation method thereof
A gas electron multiplication and effect technology, which is applied in the direction of electron multiplier tubes, electrical components, and measurement with semiconductor detectors, can solve problems such as poor gain stability, and achieve the effects of improving accuracy, improving stability, and improving work stability
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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0029] The invention discloses a multi-layer thick gas electron multiplier that suppresses the charging effect, comprising: a substrate unit and a diamond-like carbon-based film, wherein,
[0030] The substrate unit is provided with a plurality of arrayed through holes;
[0031] An isolation ring is provided along the circumference of the through hole, and the isolation ring is located on the upper and lower surfaces of the substrate unit;
[0032] The diamond-like carbon-based film is formed on the surface of the substrate unit not covered by the isolation ring;
[0033] The base unit includes a copper layer and a PCB layer; the copper layer includes a top copper layer, a middle first copper layer, a middle second coppe...
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