Method for measuring secondary electron emission coefficient of dielectric material

Abstract

The invention discloses a method for measuring the secondary electron emission coefficient of a dielectric material. The method comprises the following steps that: 1) a to-be-measured dielectric material is arranged on a metal sample table; the output ports of the metal sample table, a grid mesh and a collector are connected with the input ports of an acquisition device, voltages applied by the metal sample table and the grid mesh are the same as the voltage of the emission opening of an electron gun, and the potential of the collector is higher than the potential of the metal sample table; 2)the parameters of the electron gun are adjusted, so that an electron beam spot irradiates the surface of the metal sample table and continuously irradiates the surface of the metal sample table for set time; 3) electron energy emitted by the electron gun is adjusted to be energy required to be tested, and the irradiation position of a primary electron beam is adjusted to the surface of the dielectric material, the electron gun is made to emit a pulse electron beam, pulse current I1, pulse current I2 and pulse current I3 of the closed circuits of the metal sample table, the grid mesh and the collector are measured and calculated, and the secondary electron emission coefficient delta of the dielectric material under current electron incident energy is calculated according to the formula that delta=(I2+I3) ) / (I1+I2+I3).

Description

technical field

[0001] The invention belongs to the field of physical electronics, in particular to a method for testing the secondary electron emission coefficient of a dielectric material after using a pulsed electron gun to neutralize the positive charge on the surface of the dielectric material. Background technique

[0002] The phenomenon that electrons (or ions) with a certain kinetic energy bombard the surface of a solid material, causing electrons inside the material to be emitted from the surface of the material, is called the secondary electron emission phenomenon of the material.

[0003] The intensity of the electron current that bombards the surface of the material is called the primary electron current I p , the intensity of the electron current emitted from the material surface is called the secondary electron current I s , usually the secondary electron emission coefficient δ of the material is defined as I s with I p Ratio. If δ is less than 1, it means ...

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