Vacuum system for OLED evaporation device and working method of vacuum system

Abstract

The invention discloses a vacuum system for an OLED evaporation device and a working method of the vacuum system. The vacuum system comprises a vacuum cavity and a plurality of evaporation sources. The vacuum cavity communicates with the evaporation sources through vacuum gate valves. The vacuum cavity and the evaporation sources are connected with a vacuum pump through respective vacuum pipelines. A vacuum angle valve is arranged on each vacuum pipeline. The vacuum cavity and the evaporation sources are connected with a steel nitrogen cylinder through respective nitrogen pipelines. A pneumatic stop valve is arranged on each nitrogen pipeline. According to the vacuum system for the OLED evaporation device and the working method of the vacuum system, the vacuum gate valves are additionallyarranged between the main cavity of the device and cavities of the evaporation sources, so that the cavities of the evaporation sources and the main cavity are made independent of one another, independent vacuumizing and vacuum breaking of the main cavity ad the cavities of the evaporation cavities are achieved without mutual disturbance, the frequency of vacuum breaking of the whole system is reduced when film materials are replaced, and the productivity and evaporation quality of the evaporation device are improved.

Description

technical field [0001] The invention relates to OLED evaporation equipment, in particular to a vacuum system of OLED evaporation equipment and a working method thereof. Background technique [0002] Organic light-emitting devices (OLEDs) have attracted more and more attention in the fields of lighting and display due to their advantages of energy saving, health, thinness, environmental protection, self-luminescence, short response time, simple structure, and flexibility, and their development prospects are broad. [0003] OLED has a very simple sandwich structure. The uppermost layer and the lowermost layer are two thin-film electrodes. A multi-layer organic thin film is made between the two electrodes. The device will emit light when electricity is applied between the two electrodes. The core process in OLED production and fabrication is vacuum evaporation, and evaporation equipment provides the feasibility of evaporation process and fabrication. The stability of the vacuu...

AI Technical Summary

Problems solved by technology

Frequent vacuum breaking, the film material in the crucible in the evaporation source will frequently contact the atmosphere, which will intensify the pollution of the film material by air, water vapor, and dust, thereby affecting the quality of the coating film, and even making the film material invalid and increasing material consumption.

Moreover, the production capacity of the evaporation equipment is reduced

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