An interference microscope autofocus device and method

Abstract

The invention discloses an interference microscope autofocusing device and method. An illumination unit emits a collimated beam. The collimated beam is reflected by an illumination beam splitter to form an illumination beam. After the illumination beam passes through a microscope objective, a part of the beam is reflected by an interference beam splitter to form a reference beam, and the other part is transmitted through the interference beam splitter to form a test beam. The reference beam is sequentially reflected by a reference mirror and the interference beam splitter, and then sequentially transmitted through the microscope objective, the illumination beam splitter and a tube mirror to form a reference spot on a camera. The test beam irradiates a sample, is reflected, and is sequentially transmitted through the interference beam splitter, the microscope objective, the illumination beam splitter and the tube mirror to form a test spot on the camera. According to the invention, the problems of long time, large volume and insufficient reliability of the focusing method of an interference microscope in the prior art are solved; without increasing the volume of the interference microscope, quick and reliable autofocusing is realized; and the focusing process has the advantages of easy operation and high degree of automation.

Description

technical field [0001] The invention relates to the field of interference microscopes, in particular to an interference microscope autofocus device and method. Background technique [0002] Interference microscopy is an important tool for surface topography and film detection, widely used in machinery, electronics, optics, materials and other fields. The interference microscope integrates the functions of microscope and interferometry, and uses a microscope objective to magnify the surface of the sample to obtain the fine structure of the surface. The interference microscope is precisely adjusted so that the reference mirror is located on the object surface of the microscope objective lens, which ensures clear imaging and high-contrast interference fringes. Interference microscopes need to work in a quasi-focus state. Quasi-focus means clear imaging and interference fringes appear, otherwise it is called "out of focus". Therefore, finding a clear imaging position and inter...

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Problems solved by technology

[0005] The purpose of the present invention is to provide an interference microscope autofocus device to solve the problems of time-consuming, large volume and insufficient reliability in the focusing method of the interference microscope in the prior art, and realize the premise of not increasing the volume of the interference microscope instrument Under the condition of fast and reliable autofocus, and the focus process is easy to operate and has a high degree of automation

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