A film box cleaning device and method

A technology for cleaning devices and cassettes, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of low economic benefits and large floor space, and achieve high economic benefits, space saving, and drying the effect of time

Active Publication Date: 2022-02-22
XIAN ESWIN MATERIAL TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In view of this, the present invention provides a film cassette cleaning device and method, which are used to solve the problems that the existing film cassette cleaning machines occupy a large area and have low economic benefits

Method used

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  • A film box cleaning device and method
  • A film box cleaning device and method
  • A film box cleaning device and method

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Embodiment Construction

[0038] In order to make the objects, technical solutions, and advantages of the present invention more clear, the technical solutions of the embodiments of the present invention will be described in contemplation in conjunction with the drawings of the embodiments of the present invention. Obviously, the described embodiments are embodiments of the invention, not all of the embodiments. Based on the embodiments of the invention, all other embodiments obtained by those of ordinary skill in the art are all in the scope of the present invention.

[0039] Cleaning of wafer boxes is an important part of the semiconductor process. At present, commonly used cartridge cleaning machines are mainly orbit cleaning machines and box cleaning machines, please refer to figure 1 , figure 1 For the structural diagram of the cleaning machine in the prior art, the track-type cleaning machine is large, the structure is complex, the cost and post-maintenance costs are high. In addition, due to the tra...

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PUM

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Abstract

The invention provides a chip box cleaning device and method, which relate to the field of semiconductor wafers. The chip box cleaning device includes: a cavity, including a cleaning chamber and a drying chamber; an isolation plate, located inside the cavity, and the isolation plate has a closed state In the open state, in the closed state, it is used to isolate the cleaning chamber and the drying chamber, in the open state, the cleaning chamber and the drying chamber are connected; the film box bracket is located inside the cavity, and is used to carry the film box; mechanism, the film cassette support is arranged on the driving mechanism, and the driving mechanism can drive the film cassette support to move between the cleaning chamber and the drying chamber, and can drive the film cassette support to rotate. The embodiment of the present invention effectively solves the problems of large occupied area, high cost and low drying efficiency of the existing film cassette cleaning machine.

Description

Technical field [0001] The present invention relates to the field of semiconductor wafers, and more particularly to a cartridge cleaning apparatus and method. Background technique [0002] The wafer is a basic material for producing a semiconductor chip. Since the electrical characteristics of the semiconductor material are very important to the concentration of the magazine, the cleaning degree of wafer is important to the semiconductor chip. The wafer box is placed and conveyed by the wafer, and since the wafer needs to be kept strictly kept clean, the wafer box needs to be cleaned before placing the wafer to maintain a clean environment to avoid contamination of the wafer. At present, the commonly used cartridge cleaning machines are independent, covering area, cost and maintenance costs. Inventive content [0003] In view of this, the present invention provides a cartridge cleaning apparatus and method for solving problems with a large area and low economic benefits. [0004...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/673
CPCH01L21/67333H01L21/67057H01L21/67034
Inventor 史进李在桓
Owner XIAN ESWIN MATERIAL TECH CO LTD
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