Method for extracting thin film Young modulus of multilayer cantilever beam material on basis of Newton downhill method

Abstract

The invention discloses a method for extracting a thin film Young modulus of a multilayer cantilever beam material on the basis of a Newton downhill method, tests or analyzes the material by means ofphysical properties of the multilayer cantilever beam material and through a computer aided design algorithm, and belongs to the technical fields of measurement, test, calculation, estimation and counting. According to the invention, an extracted object is an unequal-width polycrystalline silicon and gold double-layer cantilever beam model; the multilayer cantilever beam is used as a test structure; a Young modulus of a multilayer thin film material is extracted by utilizing a multilayer micromechanical beam harmonic model; in order to enlarge a selection range of an initial value and improving the defect of local convergence of a conventional Newton iteration method, convergence of the Newton method is improved by adopting the Newton downhill method, and iteration accuracy of the Newton downhill method is improved, so as to obtain a higher iteration speed, reduce time complexity and space complexity of the algorithm and enable a calculation result to have higher convergence; and the method disclosed by the invention has the characteristics of simple test structure, high efficiency of a calculation method and high robustness.

Description

technical field [0001] The invention discloses a thin film Young's modulus extraction method of a multi-layer cantilever beam material based on Newton's down-hill method. It uses the physical properties of the multi-layer cantilever beam material and uses a computer-aided design algorithm to test or analyze the material, which belongs to measurement and testing. And the technical fields of calculation, reckoning, counting. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS, Micro-Electro-Mechanical Systems) refers to the cutting-edge technology developed on the basis of microelectronics technology that combines electricity, force, heat, light, electromagnetic and fluid technologies. In recent years, CMOS MEMS technology has been widely used in MEMS processing, and a variety of micro devices and micro systems have been manufactured. It is well known that material mechanical parameters such as Young's modulus and residual stress have a great influence on the...

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Problems solved by technology

[0004] The purpose of the present invention is to address the deficiencies of the above-mentioned background technology and provide a thin film Young’s modulus extraction method based on Newton’s downhill method for multilayer cantilever beam materials, which expands the range of initial value selection and retains the convergence of Newton’s method as much as possible The speed solves the technical problem that the current Newton method extracts the Young's modulus value of each layer does not converge or only converges in some areas, and overcomes the fact that the Newton method has strict requirements on the initial value, which makes it difficult to give a guaranteed initial value of convergence in practical applications. defect

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