Laminated evaporation source device

Abstract

The invention provides a laminated evaporation source device. A selenium evaporation layer is arranged between a first cooling box and a second cooling box; a metal evaporation layer is arranged abovethe second cooling box; and a selenium steam pipeline of the selenium evaporation layer penetrates through the second cooling box and the metal evaporation layer. According to the invention, the utilization rate of raw materials can be improved by adopting the quality beam for accurately releasing selenium steam, the activity of selenium atoms released by cracking selenium molecular groups at high temperature into selenium atoms is improved, the uniformity of the film thickness is improved, the structure of the evaporation source device is simplified, the maintenance cost of equipment is reduced, and the evaporation deposition of a flexible substrate and a rigid substrate is compatible, therefore, the distribution uniformity of the four elements of Cu, In, Ga and Se in the longitudinal direction and the transverse direction of the film is realized, and the selenium activity is fully released, and the high-quality copper indium gallium selenium film is compatible with the flexible andrigid substrate to grow. The invention has simple structure, reduces energy consumption, is easy to maintain, reduces the chamber dirt, reduces the chamber maintenance cost, shortens the production period and further improves the benefits.

Description

technical field [0001] The invention relates to the field of vapor deposition technology, in particular to a stacked evaporation source device. Background technique [0002] In recent years, with the depletion of traditional energy sources, the demand for photovoltaic cells, a green and clean energy source, has increased. At present, crystalline silicon photovoltaic cells are still the mainstream products in the market, but due to the limitation of the process, it is no longer possible to reduce the production cost by thinning the thickness of silicon wafers. The thickness of the functional layer of thin-film solar cells can be controlled within a few microns, and because thin-film solar cells can be made into rigid products or flexible products, the production process is simple and easy, and the production process is environmentally friendly, resulting in the demand for thin-film solar cells Every day. Countries with large energy demand in the world have invested a lot of...

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved in the present invention is that it fails to improve the utilization rate of raw materials, fully release the activity of selenium, and improve the uniformity of film thickness. It is not compatible with the evaporation source of flexible and rigid substrates. The invention provides a laminated evaporation source device

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