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Heat wire clamp, heat wire deposition equipment, application of heat wire clamp and heat wire deposition equipment and preparation method of tool

A technology of hot wire deposition and vapor deposition, which can be used in gaseous chemical plating, metal material coating process, coating and other directions, and can solve the problem of uneven temperature field distribution.

Pending Publication Date: 2019-11-19
SHENZHEN INST OF ADVANCED TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The first object of the present invention is to provide a hot wire fixture and a hot wire deposition device to alleviate the uneven temperature field distribution caused by the different force of each hot wire in the prior art hot wire fixture technical problem

Method used

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  • Heat wire clamp, heat wire deposition equipment, application of heat wire clamp and heat wire deposition equipment and preparation method of tool
  • Heat wire clamp, heat wire deposition equipment, application of heat wire clamp and heat wire deposition equipment and preparation method of tool
  • Heat wire clamp, heat wire deposition equipment, application of heat wire clamp and heat wire deposition equipment and preparation method of tool

Examples

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Embodiment 1

[0054] figure 1 It is a hot wire clamp according to an embodiment of the present invention, figure 2 It is a structural schematic diagram of a hot wire fixing rod in an embodiment, image 3 It is a structural schematic diagram of a hot wire carrying rod in an embodiment, Figure 4 It is a structural schematic diagram of a spring in an embodiment.

[0055] Such as figure 1 -4, the hot wire fixture includes:

[0056] (A) Fixture bracket, including the first heating wire fixing rod 101, the first heating wire carrying rod 102, the second heating wire carrying rod 103 and the second heating wire fixing rod 104 arranged in parallel at intervals in sequence, the first heating wire fixing rod 101 can move along the vertical direction of the first hot wire carrying rod 102, and,

[0057] (B) A plurality of heating wires 105 are arranged in parallel and at intervals to form a heating wire group, and the two ends of each heating wire 105 are respectively fixedly connected to the f...

Embodiment 2

[0078] This embodiment is a hot wire deposition device, and the hot wire fixture provided in Embodiment 1 is installed in the deposition chamber of the device.

Embodiment 3

[0080] This embodiment is a preparation method of a diamond-coated cutter. The cutter base is a milling cutter, specifically a Jinlu brand GR-ESL4D6*25*60*d6 cutter. The preparation method includes the following steps:

[0081] a) Pretreatment of the surface of the tool substrate: the pretreatment method is to perform sandblasting on the milling cutter substrate to remove surface adherents, and then ultrasonically clean it in acetone and alcohol for 30 minutes;

[0082] b) Utilize the hot wire chemical vapor deposition method to deposit a micro-diamond coating on the surface of the pretreated tool substrate: use hydrogen and methane as reaction gases to deposit a micro-diamond coating on the surface of the pretreated cemented carbide milling cutter substrate. The deposition conditions are as follows: methane accounts for 3% of the total gas volume, the vacuum chamber pressure is 4kPa, the filament temperature is 2300°C, the substrate temperature is 800°C, and the deposition time ...

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Abstract

The invention provides a heat wire clamp, heat wire deposition equipment, application of the heat wire clamp and the heat wire deposition equipment and a preparation method of a tool, and relates to the technical field of hear wire vapor deposition. The heat wire clamp comprises a clamp support, a heat wire set formed by arranging multiple heat wires in parallel at intervals and springs. The clampsupport comprises a first heat wire fixing rod, a first heat wire bearing bar, a second heat wire bearing bar and a second heat wire fixing rod, all of which are sequentially arranged in parallel atintervals, and the first heat wire fixing rod can move in the vertical direction of the first heat wire bearing bar. The heat wire set is fixedly connected to the first heat wire fixing rod and the second heat wire fixing rod and is in contact with the first heat wire bearing bar and the second heat wire bearing bar. The two ends of each spring are fixedly connected to the first heat wire fixing rod and the second heat wire fixing rod correspondingly, and the springs are parallel to the heat wires. The technical problem that in a heat wire clamp in the prior art, under the work conditions, temperature field distribution is not uniform due to the fact that force borne by the heat wires is different is relieved, and the technical effect of improving temperature difference distribution uniformity is achieved.

Description

technical field [0001] The invention relates to the field of hot wire vapor deposition, in particular to a hot wire fixture, hot wire deposition equipment, their application, and a method for preparing a tool. Background technique [0002] The basic principle of preparing diamond film by hot wire chemical vapor deposition is as follows: the mixed gas of carbon source (such as methane, acetone, etc.) and hydrogen passes through the metal hot wire, and decomposes methyl and hydrogen atoms in the high temperature field formed by the hot wire. And under a certain pressure, a large number of methyl groups interact with the alloy substrate at a certain temperature and complex recombination reactions occur between the methyl groups to generate various sp, sp2 and sp3 hybridized hydrocarbon groups. Since the hydrogen atoms have a strong etching effect on the sp2 bond structure carbon, the formation of graphite is inhibited; at the same time, the hydrogen atom has a small etching eff...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/44
CPCC23C16/271C23C16/44
Inventor 唐永炳陈波王陶杨扬
Owner SHENZHEN INST OF ADVANCED TECH