MOCVD real-time online infrared detection system

Abstract

The invention discloses an MOCVD real-time online infrared detection system, and the system comprises a reaction kettle, a reaction tank control host, a gas tank, host control software and host quantification software, wherein a plurality of gas pipes are arranged in the reaction kettle, a probe is arranged on the reaction tank control host, and the probe is inserted into the gas tank from the side surface; a gas component in the reaction kettle enters the gas pool through the gas pipe; the probe is used for continuously tracking and detecting gas components flowing through the gas pool, and the host control software is used for calculating the accurate number of reaction components in real time and generating a reaction component concentration change curve and a pure component three-dimensional infrared spectrogram; and the host quantification software is used for quantitatively measuring the change of the content and the concentration of each component in the reaction system in realtime. The system effectively solves the problems of complex MOCVD reaction process and difficulty in sampling analysis reaction under high-temperature and pressure conditions, is convenient for researchers to understand key process parameters, and improves the process stability and efficiency.

Description

technical field [0001] The invention relates to the fields of reaction kinetics, material science and technology, thermal automation, power plant chemistry and metals, in particular to an MOCVD real-time online infrared detection system. Background technique [0002] As one of many methods of non-destructive testing, infrared detection has its own characteristics in comparison, but infrared detection has its own unique features, forming its detection advantages, which can complete x-ray, ultrasonic, Acoustic emission and laser holographic detection technologies can not be responsible for the detection. Non-contact: The implementation of infrared detection does not require contact with the object to be inspected. The object to be inspected can be static or movable, and it can be a hot body with a temperature as high as thousands of degrees Celsius, or a cold body with a very low temperature. Therefore, the application range of infrared detection is extremely wide, and it is ...

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Problems solved by technology

[0007] The purpose of the present invention is to provide a real-time online infrared detection system for MOCVD to solve the complex reaction process of MOCVD (metal organic compound chemical vapor deposition) and the difficulty of sampling and analyzing the reaction under high temperature and pressure conditions, so as to facilitate researchers to understand key process parameters and improve Process stability and efficiency

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