Integrated multiband filtering sensor integrated with focusing function and preparation method thereof

Abstract

The invention discloses an integrated multiband filtering sensor integrated with a focusing function, which comprises a substrate circuit layer; a photosensitive device layer is arranged on the substrate circuit layer, and the substrate circuit layer is electrically connected with the photosensitive device layer; a filtering structure layer is arranged on the photosensitive device layer, a focusing structure layer is arranged on the filtering structure layer, and the focusing structure layer is used for focusing light onto the photosensitive device layer and can generate a phase shift of 0-2piin a visible light range; the filtering structure layer is composed of a nanometer disc array, the height of the nanometer disc array is 50-200 nm, the period of the nanometer disc array is 100-400 nm, and the aspect ratio of the nanometer disc array is 1: 10-1: 1. According to the invention, filtering of multiple wavelengths is realized by using the amorphous silicon nanometer disc structure, amorphous silicon can be formed on different substrates, and the sensor has good process compatibility. The focusing structure layer, the filtering structure layer and the photosensitive device layer are all integrated on the CMOS wafer, so that miniaturization and portability of the multiband filtering imaging device can be realized.

Description

technical field [0001] The invention relates to the technical field of image sensing, in particular to an integrated multi-band filter sensor with a focusing function and a preparation method thereof. Background technique [0002] The traditional multi-band filter imaging system includes large and complex optical components for continuously reducing aberrations, as well as a variety of image sensors that detect different incident wavelengths, so that multi-band filter imaging can be completed, so the traditional multi-band filter The imaging system is complex, bulky and inconvenient to use. Therefore, how to realize the miniaturization and portability of the multi-band filter imaging system is still an urgent problem to be solved. Contents of the invention [0003] Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides an integrated multi-band filter sensor with focusing function and a preparation method thereof. ...

AI Technical Summary

Problems solved by technology

[0002] The traditional multi-band filter imaging system includes large and complex optical components for continuously reducing aberrations, as well as a variety of image sensors that detect different incident wavelengths, so that multi-band filter imaging can be completed, so the traditional multi-band filter The imaging system is complex, bulky and inconvenient to use

Images