A Symmetrical Three-Waveguide Polarizing Beam Splitter Based on Subwavelength Structure
A polarization beam splitter and sub-wavelength structure technology, applied in the field of integrated optics, can solve problems such as unfavorable process operation, high design complexity and loss, and achieve the effect of reducing weak coupling, reducing dependence and stabilizing device performance
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[0022] Such as figure 1 As shown, a symmetrical three-waveguide polarization beam splitter based on subwavelength structure, including: input channel 1, right channel 2, right output channel 3, middle channel 4, left channel 5, left output Channel 6; one end of right direct channel 2 is connected to input channel 1, and the other end is connected to right output channel 3; one end of left direct channel 5 is connected to left output channel 6; left direct channel 5, middle direct channel 4 and the right through channel 2 are arranged parallel and aligned, and the distance between the three channels is 200nm-500nm, forming a symmetrical three-waveguide directional coupler structure 7 .
[0023] figure 2 is a schematic cross-sectional view of the symmetrical three-waveguide directional coupler structure 7 . The middle of the through channel in the coupling area is etched into a subwavelength grating structure (SWG); the SWG structure is composed of high refractive index mater...
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