A coupling device and preparation method based on graphene and metasurface structure

Abstract

The invention discloses a coupling device and method, including a substrate, an insulating layer, a first metasurface structure, a second metasurface structure, a third metasurface structure, a graphene layer, a first metasurface structure, and a second metasurface The structure and the third metasurface structure respectively include the first unit, the second unit and the third unit periodically arranged along the X direction; the geometric parameters of the coupling device include the first metasurface structure, the second metasurface structure, the third metasurface The respective refractive index, period and thickness of the structures; the geometric parameters are configured such that when the incident light hits the graphene layer, the third metasurface structure and the first metasurface structure respectively transmit and reflect the incident light to the second metasurface structure, so that The incident light propagates in the second metasurface structure, the incident direction of the incident light and the plane of the propagation direction of the incident light in the second metasurface structure are perpendicular to the XOY plane, and the angle between the incident direction and the propagation direction is an obtuse angle. The invention has the advantages of large bandwidth and high coupling efficiency.

Description

technical field [0001] The invention relates to the technical field of photonic integrated chips, in particular to a coupling device based on graphene and a metasurface structure and a preparation method. Background technique [0002] In the photonic integrated chip, the optical coupling device is one of the very important integrated devices, which can couple the light from the external space into the photonic chip. There are two main types of optocouplers, horizontal coupling and vertical coupling, among which the vertical coupling has the advantages of large alignment tolerance, convenient testing, and simple manufacturing process. [0003] At present, the single-layer vertical coupling grating based on the principle of diffraction can design the grating period according to the wavelength of the incident light. However, this method still faces problems such as low coupling efficiency and sensitivity to the wavelength of the incident light. [0004] Although the multi-laye...

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Problems solved by technology

[0003] At present, the single-layer vertical coupling grating based on the principle of diffraction can design the grating period according to the wavelength of the incident light. However, this method still faces problems such as low coupling efficiency and sensitivity to the wavelength of the incident light.

[0004] Although the multi-layer grating structure can improve the coupling efficiency, but the working wavelength is small

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