Micromechanical component and method for manufacturing the same
A technology of micromechanical components and some components, which is applied in the direction of manufacturing microstructure devices, processes for producing decorative surface effects, microstructure technology, etc., can solve problems such as error signals, and achieve easy mechanical properties, good quality, and reduced effect of size
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[0029] figure 1 A rotational speed sensor 1 according to the prior art is shown. When manufacturing such a sensor 1 , the silicon structure 2 is usually produced by depositing a thick silicon layer and then etching this layer. Upon etching, trenches 3 (channel trenches) with a high aspect ratio are created in the silicon layer. The sacrificial layer arranged below the thick silicon layer is removed in a second step, so that a movement of the silicon structure 2 relative to the substrate 10 becomes possible due to the vertical gap 4 produced. A thin polysilicon layer can also be arranged below the movable structure 2 , from which polysilicon layer is produced by etching further elements 5 , 6 which can be used, for example, as suspensions 5 or electrodes 6 .
[0030] figure 2 A further rotational speed sensor 1 according to the prior art is shown. In the embodiment shown, the conductor track 7 is produced by etching from a thin polysilicon layer. The movable structure 2 o...
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