A kind of metal thin film preparation device and method suitable for polyhedral eutectic reflector
A metal thin film and preparation device technology, which is applied in metal material coating process, mirror, sputtering coating, etc., can solve the problems of poor film uniformity, high reflection, and affecting the performance of optical devices, etc., and achieve the effect of high utilization rate
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specific Embodiment approach 1
[0042] Specific implementation mode one: as Figure 1 to Figure 7As shown, this embodiment discloses a metal thin film preparation device suitable for polyhedron conformal reflectors, including a sealed cavity 1, an X-Y direction displacement platform 2, a cylindrical magnetron sputtering target 4 (the prior art), Turntable 3 (for prior art, outsourced product) and lifting mechanism 5; Described sealing cavity body 1 comprises sealing cavity 6 and sealing cavity cover 7;
[0043] The X-Y direction displacement platform 2 is fixedly connected with the lower surface of the sealing chamber cover 7, the sealing chamber cover 7 is arranged at the upper opening of the sealing chamber 6, and the outer wall of the sealing chamber cover 7 is fixedly connected with the lifting rod of the lifting mechanism 5 , the lifting mechanism 5 is fixedly connected to the outer wall of the sealed chamber 6 (the sealed chamber cover 7 is driven to move up and down by the lifting mechanism 5, thereby...
specific Embodiment approach 2
[0046] Specific implementation mode two: as Figure 1-Figure 4 As shown, this embodiment is a further description of specific embodiment one. The X-Y direction displacement platform 2 includes a Y direction displacement table 8, a screw one 9, a motor one 10 (servo motor), a drive block one 11, and an X direction displacement platform 2. Translation table 12, screw rod 2 13, motor 2 14 (servo motor) and drive block 2 15;
[0047] The lower surface of the sealed chamber cover 7 is fixed with a motor one 10, the output shaft of the motor one 10 is coaxially fixedly connected with one end of the screw rod one 9, the screw rod one 9 is arranged along the Y direction, and the driving block one 11 The middle part is provided with a screw hole screwed with the screw one 9, the driving block one 11 is screwed and connected with the screw one 9, the driving block one 11 is fixedly connected with the outer wall of the Y-direction displacement table 8, and the Y-direction displacement ta...
specific Embodiment approach 3
[0049] Specific implementation mode three: as figure 1 , Figure 5 and Figure 6 As shown, this embodiment is a further description of specific embodiment one. The lifting mechanism 5 is a motor-driven lifting mechanism, and the motor-driven lifting mechanism includes a driving motor 17, a driving screw 18 and a threaded sleeve 19; the sealing The lower part of the outer wall of the chamber 6 is fixed with a support body 20, the middle part of the support body 20 is provided with a through hole in the axial direction, the drive motor 17 is fixed on the bottom surface of the support body 20, and the output shaft of the drive motor 17 penetrates the through hole. In the hole, the drive screw 18 is vertically arranged, the lower end of the drive screw 18 is coaxial and fixedly connected to the output shaft of the drive motor 17, the upper end of the drive screw 18 is arranged in the threaded sleeve 19 and the two are screwed and connected, and the sealed cavity The outer wall o...
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