A method for ultra-precision fly-cutting of micron-scale steps
A processing method and ultra-precision technology, applied in metal processing equipment, metal processing mechanical parts, manufacturing tools, etc., can solve the problems that the fast tool servo cannot be processed, it is difficult to meet the application requirements, and the accuracy of the fast tool servo machining mechanism is limited. The effect of simple implementation method and low implementation cost
Active Publication Date: 2021-05-04
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
Limited by the precision of the fast tool servo machining mechanism, the height of the continuous micro-scale steps processed cannot be further reduced
Moreover, the fast tool servo cannot process a continuous continuous micro-scale step on a plane, which is difficult to meet the application requirements
Method used
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[0032] Such as Figure 1-Figure 5 As shown, choose a horizontal ultra-precision single-point diamond flying cutting machine tool, that is, the machine tool can meet the resolution requirements of cutting depth of 1 μm-5 μm, the movement speed of the ultra-precision linear motion mechanism is 2mm / min-5mm / min, and the spindle speed range is 100rpm / min-600rpm / min is required. A circular copper workpiece with a diameter of 50mm and a thickness of 10mm is clamped on the stage that can be used as a linear feed unit, and the height of the processing step is 0.5um according to the requirements. Select rotational speed n1=100rpm / min, rotational speed n2=200rpm / min and feed speed v=3mm / min.
[0033] The horizontal ultra-precision single-point diamond fly-cutting machine tool includes a main shaft 3, and a flying cutting cutter head 4 is arranged on the main shaft 3, and a knife rest 6 is arranged on the outer wall of the flying cutting cutter head 4, and a knife rest 6 is arranged on t...
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The invention discloses a micron-scale step ultra-precision flying-cutting processing method, which uses a single-point diamond flying-cutting machine to fly-cut a processed part, and realizes continuous micro-scale step processing by adjusting the rotational speed of a main shaft during the processing. On the basis of the traditional ultra-precision single-point diamond flying-cutting process, the invention uses a single-point diamond flying-cutting machine tool under the condition of precise control of the processing environment, takes an ultra-precision numerical control machine tool as a processing platform, and adopts a natural single-crystal diamond tool to pass the single-point diamond cutting tool. The cutting method directly processes a high-precision plane, and the flying cutting cutter head is used at different speeds of the main shaft, due to the action of centrifugal force, the cutting point of the single-point diamond tool changes in height, so as to realize the determination of continuous micro-scale steps. Using this method, ultra-precision fly-cutting processing of steps of several microns and high steepness can be realized, and an effective processing method is provided for ultra-precision processing of micro-scale steps on the surface.
Description
technical field [0001] The invention relates to the technical field of mechanical processing, in particular to a micron-scale step ultra-precision fly-cutting processing method. Background technique [0002] Continuous micro-scale steps have important application value in the fields of friction reduction and optoelectronic display due to their special physical and optical properties. Because its special application field requires continuous micro-scale steps to have extremely high surface topography accuracy and ultra-low surface roughness value, this manufacturing technology has important strategic significance and economic value. Traditional single-point diamond flying cutting is only used to process planar parts, but at present, some optical parts require continuous micro-scale step processing, and most of them are processed on ultra-precision CNC machine tools with fast tool servo. Limited by the precision of the fast-tool servo machining mechanism, the height of the co...
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IPC IPC(8): B23D79/00B23Q5/36
CPCB23D79/00B23Q5/36
Inventor 阳红张敏戴晓静刘有海宋珂炜尹承真孙守利杨光伟
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS