Preparation method of epitaxial structure for medical sterilization and disinfection

Abstract

The invention provides a preparation method of an epitaxial structure for medical sterilization and disinfection. The preparation method comprises the steps of providing a substrate placed on a tray;growing a transition layer on the substrate; growing a first semiconductor layer on the transition layer; growing an active layer on the first semiconductor layer; and growing a second semiconductor layer on the active layer, wherein the active layer comprises a plurality of quantum barrier layers and a plurality of quantum well layers which are alternately grown on the first semiconductor layer,the tray is kept in a rotating state in the process of growing the transition layer, the first semiconductor layer, the active layer and the second semiconductor layer, and the rotating speed of the tray is changed in a gradual change mode in the process of growing the active layer. According to the invention, the rotating speed of the tray is changed in a gradual change mode in the process of growing the active layer, so that the aluminum content can be changed in a curve mode, the generated potential barriers and potential wells transit in a smooth mode, the transition of electrons or holesand composite light emitting are better facilitated, the internal quantum efficiency is improved, and then the sterilization and disinfection effect is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method for preparing an epitaxial structure for medical sterilization and disinfection. Background technique [0002] The application of LED light source is not limited to general lighting. In the field of agriculture, LED lighting can be applied to vegetable production. After being illuminated by special LED lamps, the quality and output are greatly improved; in the field of automobiles, LED lights for vehicles have low energy consumption, high reliability, long life, and environmental protection. And it can improve safety at night, which is a new blue ocean in the LED lighting market; in terms of medical treatment, from outdoor to indoor, from special to general, the use of LED in the medical field continues to expand. According to the forecast of relevant research institutions, from 2010 to 2017, the application of LED in sterilization and disinfection is expected to...

AI Technical Summary

Problems solved by technology

[0005] Although ultraviolet LEDs have attracted the attention of the industry in recent years, their development has been slow, and they cannot be mass-produced and market-applied as quickly as visible LEDs. One reason is that they are affected by low mass production rates and high production costs. The current UV epitaxy technology is immature, the internal quantum efficiency is low, and the emitted light power is not high, which affects the application value of the product

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