Ultra-low dielectric LTCC microwave ceramic material and preparation method thereof

Abstract

The invention belongs to the field of electronic ceramic materials and manufacturing thereof, and relates to an ultra-low dielectric LTCC microwave ceramic material and a preparation method thereof. The ultra-low dielectric LTCC microwave ceramic material provided by the invention is a SiO2-Li2TiO3 composite ceramic taking SiO2 as a main crystal phase, wherein the sintering temperature is 850-900DEG C; the dielectric constant epsilon r is 4.5-5.1; the quality factor Q * f value ranges from 18500 GHz to 26000 GHz; the resonance frequency temperature coefficient tau f ranges from -4.5 ppm / DEG Cto 5 ppm / DEG C; the molecular formula is xSiO2-(1-x)Li2TiO3-yLBSCA(Li2O-B2O3-SiO2-CaO-Al2O3)glass, x is more than or equal to 0.9 and less than or equal to 0.95 molar ratio, y is more than or equal to 4wt% and less than or equal to 8wt% by mass, and the ultra-low dielectric LTCC microwave ceramic material is prepared by a solid phase method. The ultra-low dielectric LTCC microwave ceramic material is simple in manufacturing process, can be produced in batches, and can be widely applied to LTCC microwave substrates, laminated microwave devices and modules when being used as an LTCC microwave dielectric substrate or device material; the low dielectric constant corresponds to the short signal delay time, and the signal transmission speed can be improved.

Description

technical field [0001] The invention belongs to the field of electronic ceramic materials and its manufacture, and relates to an ultra-low dielectric LTCC microwave ceramic material and a preparation method thereof, which are sintered at a low temperature and have an extremely low dielectric constant. Background technique [0002] In recent years, with the rapid development of consumer electronics, automotive electronics, military communications, medical equipment and other fields, the market demand for miniaturized, integrated, multi-functional and high-reliability electronic components has become stronger. The LTCC (low temperature co-fired ceramics) technology completes the hierarchical integration of the substrate by making full use of the three-dimensional space, and integrates passive devices, conductive phases, and surface active devices on the green substrate. , Au, etc.) co-firing to realize the integration and high-density packaging of devices is an important techn...

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Problems solved by technology

[0008] In view of the above problems or deficiencies, in order to solve the existing SiO 2 Ceramics cannot have both low dielectric constant and low loss while being compatible with LTCC technology. The present invention provides an ultra-low dielectric LTCC microwave ceramic material and its preparation method. 2 LTCC microwave ceramic material with main crystal phase and low dielectric constant and low loss

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