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Ultra-low dielectric LTCC microwave ceramic material and preparation method thereof

A microwave ceramic and ultra-low dielectric technology, which is applied in the field of ultra-low dielectric LTCC microwave ceramic materials and their preparation, can solve the problem of not having both low dielectric constant and the like, and achieves reduction of grain boundaries and defects, elimination of pores, and dielectric constant. low effect

Inactive Publication Date: 2020-03-24
UNIV OF ELECTRONICS SCI & TECH OF CHINA +1
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Problems solved by technology

[0008] In view of the above problems or deficiencies, in order to solve the existing SiO 2 Ceramics cannot have both low dielectric constant and low loss while being compatible with LTCC technology. The present invention provides an ultra-low dielectric LTCC microwave ceramic material and its preparation method. 2 LTCC microwave ceramic material with main crystal phase and low dielectric constant and low loss

Method used

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  • Ultra-low dielectric LTCC microwave ceramic material and preparation method thereof
  • Ultra-low dielectric LTCC microwave ceramic material and preparation method thereof
  • Ultra-low dielectric LTCC microwave ceramic material and preparation method thereof

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Embodiment Construction

[0026] Described below is the specific embodiment of LTCC microwave ceramic material of the present invention, and the prescription molecular formula of this ultra-low dielectric LTCC microwave ceramic material is 0.95SiO 2 -0.05Li 2 TiO 3 -y LBSCA, where y takes the value of 5wt%, SiO 2 Nano-SiO with an average particle size of less than 100nm 2 .

[0027] Its preparation process is as follows image 3 Shown, concrete preparation method comprises the following steps:

[0028] Step 1, with Li 2 CO 3 、TiO 2 As the initial raw material, according to the molar ratio Li 2 CO 3 :TiO 2 = 1:1 convert the corresponding mass to weigh the material, and then perform a ball mill in a planetary ball mill for 12 hours. After ball milling, the material is placed in an oven and dried at 100 ° C. The molecular structure formed is Li 2 TiO 3 .

[0029] Step 2. Pass the dried material obtained in step 1 through a 40-mesh sieve, put it into a crucible for compaction, and heat it up t...

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Abstract

The invention belongs to the field of electronic ceramic materials and manufacturing thereof, and relates to an ultra-low dielectric LTCC microwave ceramic material and a preparation method thereof. The ultra-low dielectric LTCC microwave ceramic material provided by the invention is a SiO2-Li2TiO3 composite ceramic taking SiO2 as a main crystal phase, wherein the sintering temperature is 850-900DEG C; the dielectric constant epsilon r is 4.5-5.1; the quality factor Q * f value ranges from 18500 GHz to 26000 GHz; the resonance frequency temperature coefficient tau f ranges from -4.5 ppm / DEG Cto 5 ppm / DEG C; the molecular formula is xSiO2-(1-x)Li2TiO3-yLBSCA(Li2O-B2O3-SiO2-CaO-Al2O3)glass, x is more than or equal to 0.9 and less than or equal to 0.95 molar ratio, y is more than or equal to 4wt% and less than or equal to 8wt% by mass, and the ultra-low dielectric LTCC microwave ceramic material is prepared by a solid phase method. The ultra-low dielectric LTCC microwave ceramic material is simple in manufacturing process, can be produced in batches, and can be widely applied to LTCC microwave substrates, laminated microwave devices and modules when being used as an LTCC microwave dielectric substrate or device material; the low dielectric constant corresponds to the short signal delay time, and the signal transmission speed can be improved.

Description

technical field [0001] The invention belongs to the field of electronic ceramic materials and its manufacture, and relates to an ultra-low dielectric LTCC microwave ceramic material and a preparation method thereof, which are sintered at a low temperature and have an extremely low dielectric constant. Background technique [0002] In recent years, with the rapid development of consumer electronics, automotive electronics, military communications, medical equipment and other fields, the market demand for miniaturized, integrated, multi-functional and high-reliability electronic components has become stronger. The LTCC (low temperature co-fired ceramics) technology completes the hierarchical integration of the substrate by making full use of the three-dimensional space, and integrates passive devices, conductive phases, and surface active devices on the green substrate. , Au, etc.) co-firing to realize the integration and high-density packaging of devices is an important techn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/14C04B35/622C04B35/64
CPCC04B35/14C04B35/622C04B35/64C04B2235/3203C04B2235/3234C04B2235/5454
Inventor 苏桦向汝唐晓莉李元勋陶志华陈加旺陈振威
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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