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Chlorosilane and high polymer leakage cleaning system

A polymer and chlorosilane technology, which is applied in the field of chlorosilane and polymer leakage cleaning systems, can solve problems such as normal production and production safety hazards, blockage of equipment and waste discharge lines, corrosion of equipment and pipelines, and achieve compact structure , Reduce material waste and avoid clogging problems

Inactive Publication Date: 2020-03-27
南京合创工程设计有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the production process of polysilicon, if chlorosilane and high polymer leak, it will seriously corrode various equipment and pipelines. At the same time, high polymer leakage will burn and catch fire when it encounters air, causing great harm to normal production and production safety.
[0003] The existing cleaning method for chlorosilane and polymer leakage is mainly to discharge it into the lye pool for neutralization and hydrolysis reaction, but this method also has disadvantages, such as high-frequency discharge of waste liquid and material loss Larger, because high polychlorosilane has a certain viscosity, it will adhere to the inner wall of the equipment pipeline, which will easily cause blockage of equipment and waste pipelines

Method used

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  • Chlorosilane and high polymer leakage cleaning system
  • Chlorosilane and high polymer leakage cleaning system
  • Chlorosilane and high polymer leakage cleaning system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Such as figure 1 As shown, this implementation provides a chlorosilane and high polymer leakage cleaning system, which includes a washing tower 3 and a sodium edetate liquid mixing tank 28; the washing tower 3 is used to feed the leaked material The pipeline 1 enters the chlorosilane and high polymer in the washing tower 3 for treatment, the leaked material feeding pipeline 1 is provided with a feed valve 2, and the washing tower 3 is provided with a first tray 4 and a first re- Boiler 5, the first reboiler 5 uses a tank type reboiler, the first thermometer 22 is arranged on the washing tower 3, the first waste line 18 is arranged at the bottom of the washing tower 3, and the first waste line 18 is arranged at the bottom of the washing tower 3. A waste discharge line 18 is provided with a first waste discharge valve 19; the sodium ethylenediaminetetraacetate liquid mixing tank 28 is used to configure the sodium edetate liquid for cleaning chlorosilanes and high polymers...

Embodiment 2

[0032] Such as figure 2As shown, this implementation provides a chlorosilane and high polymer leakage cleaning system, which includes a washing tower 3, a sodium edetate liquid mixing tank 28 and a distillation tower 7; the washing tower 3 is used to pass through The leaked material feed line 1 enters the chlorosilane and high polymer in the washing tower 3 for treatment, the leaked material feed line 1 is provided with a feed valve 2, and the washing tower 3 is provided with a first tray 4 and the first reboiler 5, the first reboiler 5 uses a kettle-type reboiler, the washing tower 3 is provided with a first thermometer 22, and the washing tower 3 bottom is provided with a first waste line 18 , the first waste discharge pipeline 18 is provided with a first waste discharge valve 19; the sodium edetate liquid mixing tank 28 is used to configure the sodium edetate liquid for cleaning chlorosilanes and polymers, The top of the sodium edetate liquid mixing tank 28 is provided wi...

Embodiment 3

[0035] Such as image 3 As shown, this implementation provides a chlorosilane and high polymer leakage cleaning system, which includes a washing tower 3, a sodium edetate liquid mixing tank 28, a distillation tower 7, a gas filter 11, a condensation tank 14 and Reflux pump 16; the washing tower 3 is used to process the chlorosilane and high polymers that enter the washing tower 3 through the leaked material feed line 1, and the leaked material feed line 1 is provided with a feed valve 2, The washing tower 3 is provided with a first tray 4 and a first reboiler 5, and the first reboiler 5 uses a kettle-type reboiler, and the washing tower 3 is provided with a first thermometer 22, so The bottom of the washing tower 3 is provided with a first waste discharge pipeline 18, and the first waste discharge pipeline 18 is provided with a first waste discharge valve 19; the sodium edetate liquid mixing tank 28 is used to configure and clean up chlorosilane and the sodium edetate liquid ...

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Abstract

The invention provides a chlorosilane and high polymer leakage cleaning system, which comprises a washing tower and a sodium ethylene diamine tetracetate liquid preparation tank, wherein the washing tower is used for treating chlorosilane and a high polymer entering the washing tower through a leaked material inlet pipeline, a material inlet valve is arranged on the leaked material inlet pipeline,a first tower plate and a first reboiler are arranged in the washing tower, a first waste discharge pipeline is arranged at the bottom of the washing tower, and a first waste discharge valve is arranged on the first waste discharge pipeline. According to the invention, the chlorosilane and high polymer leakage cleaning system overcomes the defects in the prior art, is simple in structure, reasonable in design and compact in structure, can completely clean leaked chlorosilane and high polymers so as to reduce the harm to normal production and production safety and reduce the waste of materials, does not require high-frequency emission so as to reduce material loss, and prevents equipment and pipelines from being blocked due to adhesion of leaked materials to the inner walls of the pipelines and the equipment.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a chlorosilane and high polymer leakage cleaning system. Background technique [0002] In the production process of polysilicon, if chlorosilane and high polymer leak, it will seriously corrode various equipment and pipelines. At the same time, high polymer leakage will burn and catch fire when it encounters air, causing great harm to normal production and production safety. [0003] The existing cleaning method for chlorosilane and polymer leakage is mainly to discharge it into the lye pool for neutralization and hydrolysis reaction, but this method also has disadvantages, such as high-frequency discharge of waste liquid and material loss Larger, due to the high polychlorosilane has a certain viscosity, it will adhere to the inner wall of the equipment pipeline, which is easy to cause blockage of equipment and waste pipelines. Contents of the invention [0004]...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A62D3/30A62D101/22
CPCA62D3/30A62D2101/22
Inventor 康荣鑫陈丹
Owner 南京合创工程设计有限公司
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