Workpiece feeding mechanism for vacuum coating machine

A vacuum coating machine and workpiece technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of high difficulty in placing the workpiece, jamming of the bearing platform, and easy tilting, etc., and achieve good Lubrication and limit effect, stable connection mechanism, and stable structure

Pending Publication Date: 2020-03-27
深圳市顺捷真空技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The workpiece loading mechanism on the market mostly adopts an integrated design in use. It is difficult to place the workpiece, and at the same time, it is p

Method used

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  • Workpiece feeding mechanism for vacuum coating machine
  • Workpiece feeding mechanism for vacuum coating machine
  • Workpiece feeding mechanism for vacuum coating machine

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Embodiment Construction

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0019] see Figure 1-3 , the present invention provides a technical solution: a workpiece feeding mechanism for a vacuum coating machine, including a body 1, a slide rail 2, a fixing bolt 3, a limit baffle 4, a conveyor belt 5, a slider 6, a platform 7, The embedding groove 8, the placing plate 9, the embedding block 10, the fixed block 11, the friction pad 12, and the placing table 13 are characterized in that: slide rails 2 are fixed on both sides of the upp...

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Abstract

The invention discloses a workpiece feeding mechanism for a vacuum coating machine. A machine body, sliding rails, fixing bolts, limiting baffles, a conveying belt, sliding blocks, a bearing table, anembedding groove, a containing disc, an embedding block, a fixing block, a friction pad and a containing table are included. The sliding rails are fixed to the two sides of the upper end of the machine body. The fixing bolts are arranged at the two ends of the inner sides of the sliding rails. The limiting baffles are distributed on the two sides of the middle portion of the machine body. The conveying belt is arranged on the inner sides of the limiting baffles. The tops of the upper ends of the sliding rails are in sliding connection with the sliding blocks, and the bearing table is fixed tothe inner sides of the sliding blocks. The workpiece feeding mechanism for the vacuum coating machine is provided with the sliding rails, the sliding rails are symmetrically distributed along the center line position of the machine body, the whole sliding rails and the machine body are connected together through screw fastening, and a connecting mechanism of the workpiece feeding mechanism is stable. Meanwhile, the effect of separation of the sliding rails and the machine body can be achieved through fixing bolt unscrewing, the dismounting and mounting manner is extremely simple, and a user conveniently conducts overhauling and checking.

Description

technical field [0001] The invention relates to the technical field of vacuum coating machines, in particular to a workpiece feeding mechanism for vacuum coating machines. Background technique [0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a relatively high degree of vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide it into evaporation and sputtering. The substrate that needs to be coated is called the substrate, and the plated material is called the target. The substrate and the target are in the same vacuum chamber. During the coating process of the workpiece, the workpiece needs to be transported through the feeding equipment to ensure that the workpiece can effectively enter the vacuum coating machine. [0003] The workpiece loading mechanism on the market adopts an integrated design in us...

Claims

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Application Information

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IPC IPC(8): C23C14/50
CPCC23C14/50
Inventor 洪瑶海洪锦隆
Owner 深圳市顺捷真空技术有限公司
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