Ultra-broadband uncooled infrared detector with single-layer structure and its preparation method
An uncooled infrared, single-layer structure technology, applied in electric radiation detectors, radiation pyrometry, instruments, etc., can solve the problems of complex manufacturing process and narrow response spectrum of wide-band response devices
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[0049] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with aspects of the present application as recited in the appended claims.
[0050] Such as figure 1 As shown, the first aspect of the present embodiment provides a single-layer ultra-broadband uncooled infrared detector, including an underlying substrate 1 and a double-supported cantilever beam structure located on the underlying substrate 1, wherein
[0051] It also includes a first metal electrode layer 2, a first metal reflective layer 3 and a first metal pr...
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