Unlock instant, AI-driven research and patent intelligence for your innovation.

Picometer microscope

A microscope and picometer technology, applied in the field of microscopy, can solve difficult problems such as picometer microscopic measurement functions

Active Publication Date: 2020-04-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
View PDF8 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the current stage, we cannot guarantee real objects with picometer-scale modulation, especially objects with continuous picometer-scale changes, for example, gratings with continuously changing grating opening ratios, because there is currently no picometer-scale modulated photoresist and corresponding Developing and fixing technology, therefore, it is difficult to guarantee the realization of picometer microscopic measurement function by directly adopting the prior technology4

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Picometer microscope
  • Picometer microscope
  • Picometer microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038] The present invention will be further described below with reference to the drawings and embodiments, but the protection scope of the present invention should not be limited by this.

[0039] See first figure 1 , figure 1 It is a schematic diagram of Example 1 of the picometer microscope of the present invention. 101 is the left beam of the picometer microscope, 201, 202 are the right beam of the picometer microscope, the angle between 101 and 201, 202 determines the distance d between the picometer light field 301 and 302; between the 201 and 202 beams There is a tiny included angle Δθ, which determines the size and distribution characteristics of the width difference Δd between the picometer light fields 301, 302, and 303. The 301, 302, and 303 picometer light fields are used to illuminate or scan the object 40, and through the imaging lens 50, the picometer light field distribution can be obtained on the detector 60 to realize the function of a picometer microscope.

[0...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A picometer microscope comprises a picometer illumination light field generation mechanism, a picometer-scale light probe output by the picometer illumination light field generation mechanism illuminates an object to be measured, and picometer-scale information of the object to be measured is obtained through a picometer microscopic imaging lens and a picometer microscopic detector. According to the invention, picometer lithography, picometer measurement and picometer-scale nonlinear optical technologies can be developed, the research direction of picometer femtosecond optics, picometer attosecond optics and other emerging disciplines is opened up, and the picometer microscope is widely applied to semiconductor lithography, picometer physics, picometer-scale interaction of light and substances and other fields.

Description

Technical field [0001] The invention relates to a microscope, particularly a pico-meter microscope, which is a device for measuring the pico-meter scale distribution of an object, and is used in pico-lithography, pico-scale light-substance interaction, pico-physics and other fields. Background technique [0002] The microscopic measurement of the picometer scale is a difficult problem that science and technology urgently hope to overcome. The microscopic measurement of picometer exceeds the limit of the current optical super-resolution technology. We know that microscopic measurement can be achieved by using a lens. The resolution of the lens is determined by the Abbe formula, which is proportional to the wavelength of the illumination used and inversely proportional to the numerical aperture of the lens. [0003] Realizing imaging technology beyond the diffraction limit has always been an urgent goal, and this technology is called super-resolution technology. There are currently ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G02B21/06G02B27/58
CPCG01B11/00G02B21/06G02B27/58
Inventor 周常河
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI