A Tunable Ultrasonic Sensor Array
An ultrasonic sensor and array technology, applied in the field of sensors, can solve the problems of low sensitivity, complex fabrication, and little research on PMUT sensor array tuning of PMUT sensors, and achieve the effects of improving receiving sensitivity, increasing sound pressure, and improving energy conversion efficiency.
Active Publication Date: 2021-01-26
武汉敏声新技术有限公司
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Problems solved by technology
Among them, ultrasonic transducers are mainly divided into two types: capacitive (cMUT) and piezoelectric (pMUT). The sensitivity of pMUT is slightly lower than that of cMUT, but cMUT needs to provide bias voltage and there is a small air gap between the capacitor plates, which is easy to form adhesion. , pMUT has the advantages of simple structure and high conversion efficiency of the transducing material, but its fabrication is more complicated
[0003] At present, the research on PMUT mainly focuses on improving the performance of a single PMUT, such as directivity, sensitivity, output sound pressure level, etc. In addition, there are also researches on PMUT arrays, mainly focusing on the directivity of sound waves emitted by PMUT arrays, and the tuning of PMUT sensors. and tuning of PMUT sensor arrays are rarely studied
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[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0030] figure 1 A schematic diagram of an ultrasonic sensor array using a PMUT with a Helmholtz resonant cavity 14 as the ultrasonic transmitting unit 1 and using the PMUT as the ultrasonic receiving unit 2 . Generally speaking, due to the characteristics of the Helmholtz resonant cavity, its resonant frequency is much lower than the resonant frequency of the piezoelectric stack 4 above it, therefore, in order to make the resonant frequency of the ultrasonic receiving unit 2 resonate with Helmholtz The resonant frequency of the cavity 14 is the same, and the resonant frequency of the ultrasonic re...
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The invention discloses a tunable ultrasonic sensor array, which comprises an ultrasonic transmitting unit and an ultrasonic receiving unit, and is characterized in that the ultrasonic transmitting unit is a piezoelectric micro-manufactured ultrasonic transducer with a Helmholtz resonant cavity; the ultrasonic receiving unit is a piezoelectric micro-manufactured ultrasonic transducer with a mass load, and the ultrasonic transmitting unit excites the Helmholtz resonant cavity to radiate sound waves by utilizing piezoelectric lamination; the ultrasonic transducer can be tuned by adjusting the mass load, so that the resonant frequency of the receiving unit is consistent with the resonant frequency of the Helmholtz resonant cavity of the transmitting unit; the ultrasonic transmitting unit andthe ultrasonic receiving unit are processed on the same wafer, and the thicknesses of piezoelectric stacks are consistent. The ultrasonic transmitting unit adopts the Helmholtz resonant cavity to amplify sound waves, the ultrasonic receiving unit adopts the mass load piezoelectric micro-manufactured ultrasonic transducer to tune the ultrasonic transducer and improve the receiving sensitivity, andthe array combining the Helmholtz resonant cavity and the mass load piezoelectric micro-manufactured ultrasonic transducer can improve the energy conversion efficiency of sound wave transmitting and receiving.
Description
technical field [0001] The invention relates to the technical field of sensors, in particular to a tunable ultrasonic sensor array. Background technique [0002] Piezoelectric acoustic transducers are transducer elements that can be used to both emit and receive sound waves. When working in the transmitting mode, the electric energy is converted into the vibration of the transducer through electrostatic force or inverse piezoelectric effect to radiate sound waves; when working in the receiving mode, the sound pressure acts on the surface of the transducer to vibrate, and the transducer The vibration is then converted into an electrical signal. At present, the most widely used acoustic wave sensors are mainly based on bulk piezoelectric transducers. Bulk piezoelectric transducers mainly use the thickness vibration mode of piezoelectric ceramics to generate sound waves. Since the resonance frequency of the thickness mode is only related to the thickness of the transducer, in ...
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IPC IPC(8): B06B1/06
CPCB06B1/0644
Inventor 孙成亮朱伟吴志鹏王磊
Owner 武汉敏声新技术有限公司