System for improving uniformity of MEMS infrared radiation surface in space environment

A space environment and upgrading system technology, applied in the field of infrared radiation calibration, can solve problems such as poor temperature uniformity of the infrared radiation surface, and achieve the effects of excellent temperature distribution uniformity, uniform current, and fast response

Active Publication Date: 2020-04-14
BEIJING ZHENXING METROLOGY & TEST INST
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Problems solved by technology

[0007] In view of the above analysis, the embodiment of the present invention aims to provide a MEMS infrared radiation surface uniformit

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  • System for improving uniformity of MEMS infrared radiation surface in space environment
  • System for improving uniformity of MEMS infrared radiation surface in space environment

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[0034] The preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. The accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to explain the principle of the present invention, and are not used to limit the scope of the present invention.

[0035] A specific embodiment of the present invention provides a MEMS infrared radiation surface uniformity improvement system (hereinafter referred to as the system) in a space environment, which is used to improve the MEMS infrared radiation surface uniformity, such as Figure 1-Figure 2 As shown, the system includes a thermal homogenization layer 1, a heating layer 2, a separate electrode group 3, and an external power supply electrode 4. The external power supply electrode 4 is connected to an external power source to supply power to the separated electrode group 3, and the separated electrode gr...

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Abstract

The invention relates to a system for improving the uniformity of an MEMS infrared radiation surface in a space environment, belongs to the technical field of infrared radiation calibration, and solves a problem that the temperature uniformity of a conventional infrared radiation surface is poor. The system for improving the uniformity of the MEMS infrared radiation surface in the space environment comprises a thermal homogenization heat conduction layer, a heating layer and a separated electrode group, wherein the thermal homogenization heat conduction layer is located between the heating layer and the MEMS infrared radiation surface; the separated electrode group supplies power to the heating layer, so that the heating layer emits heat; the heating layer is used for heating the MEMS infrared radiation surface; and the thermal homogenization heat conduction layer plays a role in thermal homogenization of the MEMS infrared radiation surface, and thus the temperature uniformity of the MEMS infrared radiation surface is improved. According to the invention, the uniformity of the MEMS infrared radiation surface in the space environment can be greatly improved, the temperature distribution uniformity is superior to 3K, and the MEMS infrared radiation surface can meet the use requirements of infrared load radiation calibration.

Description

technical field [0001] The invention relates to the technical field of infrared radiation calibration, in particular to a MEMS infrared radiation surface uniformity improvement system in a space environment. Background technique [0002] The calibration blackbody light source is an important part of the infrared load, and its performance will affect the quality of infrared imaging. Among them, the uniformity of the radiation surface of the calibration blackbody light source is a key technical indicator, and is the key to whether the calibration blackbody can meet the test requirements. [0003] The traditional calibration black body is mainly composed of four parts: radiation black body, electric heat source, temperature sensor and temperature controller. The radiation black body is generally prepared by mechanical processing, which is a radiation plate or radiation coating; the electric heat source is located on the radiation black body. around or on the back, and heat the...

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Application Information

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IPC IPC(8): G01J5/52B81C1/00B81B7/02
CPCB81C1/0069B81B7/02G01J5/80G01J5/53
Inventor 张玉国孙红胜张鑫王加朋吴柯萱李世伟杨旺林宋春晖邱超吴红霞孙广尉张林军郭靖
Owner BEIJING ZHENXING METROLOGY & TEST INST
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