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Large-view-field high-resolution laser scanning system based on piezoelectric motor adjustment

A piezoelectric motor, high-resolution technology, applied in the field of laser scanning, can solve problems such as difficult to achieve, increase the distortion and fracture of the MEMS galvanometer reflection surface, improve system resolution and scanning range, break through technical bottlenecks, reduce effect of quantity

Pending Publication Date: 2022-06-21
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This increases the risk of distortion and fracture of the reflective surface of the MEMS galvanometer, and it is difficult to achieve in practical applications

Method used

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  • Large-view-field high-resolution laser scanning system based on piezoelectric motor adjustment
  • Large-view-field high-resolution laser scanning system based on piezoelectric motor adjustment
  • Large-view-field high-resolution laser scanning system based on piezoelectric motor adjustment

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Experimental program
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Embodiment Construction

[0049] The large-field high-resolution laser scanning system based on piezoelectric motor adjustment in this embodiment includes: a ranging module composed of n ranging components, a mirror group and a scanning module; it is characterized in that a positioning control module is set in the system .

[0050] Ranging module for transmitting and receiving measurement laser beams to achieve distance measurement;

[0051] The mirror group is used to reflect the measurement beam emitted by each ranging component, and make it incident to the scanning module at a set angle;

[0052] The scanning module, which is a two-dimensional MEMS galvanometer, is used to reflect the measuring beam to the space to be measured for two-dimensional scanning;

[0053] The positioning control module is composed of a piezoelectric motor, a driver and a positioning component; the two-dimensional MEMS galvanometer and the positioning component are fixedly installed, and the piezoelectric motor controls th...

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Abstract

The invention discloses a large-view-field high-resolution laser scanning system based on piezoelectric motor adjustment, which comprises a distance measuring module formed by n distance measuring assemblies, a reflector group and a scanning module, and is characterized in that a positioning control module is arranged in the system; the positioning control module is composed of a piezoelectric motor, a driver and a positioning assembly. A two-dimensional MEMS galvanometer in the scanning module and a positioning assembly are fixedly installed, a piezoelectric motor controls the positioning assembly to adjust the spatial position of the two-dimensional MEMS galvanometer, and resolution multiplication and field angle expansion of the laser scanning system are achieved. The spatial position of the scanning assembly is changed by arranging the precise positioning module, the resolution and the field angle of the scanning system can be remarkably improved, the requirement for the performance of the scanning assembly is lowered, and the application scene of the laser scanning system is expanded.

Description

technical field [0001] The invention relates to the technical field of laser scanning, and more particularly to a large-field high-resolution laser scanning system based on piezoelectric motor adjustment. Background technique [0002] Laser scanning technology can be used to quickly obtain three-dimensional information on the surface of objects, and has been widely used in industrial manufacturing, terrain mapping, optoelectronic medical and other fields. With the expansion of measurement requirements, the complexity of the measured object continues to increase, which puts forward higher requirements for the resolution and field of view of the laser scanning system. As the core component of the laser scanning system, the MEMS galvanometer can reflect the measurement beam to the measured space through the high-frequency resonance motion of the fast axis and the low-frequency forced vibration of the slow axis to realize three-dimensional scanning. However, in order to obtain ...

Claims

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Application Information

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IPC IPC(8): G02B26/08
CPCG02B26/0858
Inventor 李瑞君康锴雷英俊梅寒冰
Owner HEFEI UNIV OF TECH
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