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Resistive microfluid pressure sensor

A pressure sensor and microfluidic technology, which is applied in the measurement of fluid pressure, fluid pressure measurement by changing ohmic resistance, and fluid pressure measurement through mechanical components, etc. high cost problem

Active Publication Date: 2020-04-17
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a resistive microfluidic pressure sensor, to at least solve one of the technical problems of low resolution and sensitivity of fluid pressure detection in the prior art and high and difficult manufacturing costs of the microfluidic pressure sensor

Method used

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Embodiment Construction

[0036] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0037]In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientation or positional relationship indicated by "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or element Must be in a particular orientation...

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Abstract

The invention relates to the technical field of microfluid pressure detection, and discloses a resistive microfluid pressure sensor, which comprises a fluid layer. A flexible thin layer is arranged onthe upper end surface of the fluid layer, and a microfluid pressure sensing cavity which is provided with a downward opening and protrudes towards the upper part of the flexible film layer is formedin the flexible film layer. An electrode layer is arranged on the upper end face of the flexible film layer, a pressure sensing liquid electrode cavity which is provided with a downward opening and protrudes towards the upper portion of the electrode layer is formed in the electrode layer, the microfluid pressure sensing cavity is formed in the pressure sensing liquid electrode cavity, and a buffer cavity is formed between the microfluid pressure sensing cavity and the pressure sensing liquid electrode cavity. A micro resistance signal measuring structure is respectively connected with a liquid electrode flow channel inlet and a liquid electrode flow channel outlet through leads. The resistive microfluid pressure sensor has the advantages of high resolution and sensitivity of fluid pressure detection and low manufacturing cost and low difficulty of the microfluid pressure sensor.

Description

technical field [0001] The invention relates to the technical field of microfluidic pressure detection, in particular to a resistive microfluidic pressure sensor. Background technique [0002] In recent years, microfluidic devices have shown unique roles and great potential in the fields of drug analysis, chemical synthesis, biological detection, and cell culture by virtue of their advantages of small size, large throughput, low energy consumption, and low cost. Microfluidic research has also become a key technology to promote the development of lab-on-a-chip. For fluid machinery, pressure is one of the most important fluid parameters. Many microfluidic systems use pressure as the driving force. Precise control of pressure is an important condition for the realization of device functions. Microfluidic chips have unique advantages in the measurement of physiological characteristics such as biological blood pressure and intraocular pressure. Effective pressure detection metho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L7/18G01L9/02
CPCG01L7/182G01L9/02
Inventor 桂林高畅张仁昌
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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