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Flexible pressure sensor and its preparation method

A pressure sensor and flexible technology, which is applied in the field of wearable sensors, can solve problems such as unreliable bonding, difficult flexible pressure sensors, and affecting device performance, so as to improve bonding performance, sensitivity, and cross-sectional bonding strength. Effect

Active Publication Date: 2022-03-18
INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the prior art, the dielectric material and the conductive material are two different materials, and the conductive material and the dielectric material are generally bonded by pressing, deposition or bonding, but the above-mentioned bonding methods are not reliable, and will affect the performance of the device
[0006] Furthermore, it can be seen from the working principle of the capacitive flexible pressure sensor that if a sensor with high sensitivity is required, a dielectric material with a lower modulus and higher elasticity is generally selected, and if a pressure sensor with a large range is required, a modulus is generally selected. It is difficult to have a flexible pressure sensor with high sensitivity and large range at the same time.

Method used

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preparation example Construction

[0043] The present invention also provides a preparation method of a flexible pressure sensor, the preparation method comprising the following steps:

[0044] providing a dielectric layer 10;

[0045] The first solution of the material of the dielectric layer 10 is configured, and the nano-metal particles of the first electrode layer 21 material are added to the first solution, and the second solution of the material of the dielectric layer 10 is configured, and the second solution is added to the second solution. Nano metal particles of the second electrode layer 22 material;

[0046] Coating the first solution and the second solution added with nano-metal particles on both sides of the dielectric layer 10, and drying, to form the first transition layer 31 and the second transition layer 32;

[0047] The first electrode layer 21 and the second electrode layer 22 are respectively formed on the sides of the first transition layer 31 and the second transition layer 32 away from...

Embodiment 1

[0058] Put 1g of PVDF powder into 10g of DMF solution, set 40°C and magnetically stir until the PVDF powder is completely dissolved, add 0.01g of dopamine to the solution, adjust the pH value to 8 with ammonia water, and then add 0.11g of nano-silver particles, Stir evenly, spin-coat the mixed solution on the upper and lower surfaces of the PVDF dielectric layer 10, rotate at a speed of 800r / min, and take 30s. After curing, the first transition layer 31 and the second transition layer 32 with a thickness of 100nm are obtained, and then spin-coated The silver nano paste was cured at a rotational speed of 800 r / min for 30 s to obtain a first electrode layer 21 and a second electrode layer 22 with a thickness of 100 nm. Obtain a high-reliability piezoelectric flexible pressure sensor with a sensitivity of 0.1kpa -1 , the measurement range is 200Mpa, the bonding force between the electrode layer and the base material is tested by the 100-grid method, and the bonding force between ...

Embodiment 2

[0060] Mix 1g of PVDF powder into 10g of DMF solution, set at 80°C and stir magnetically until the PVDF powder is completely dissolved, add 0.02g of dopamine to the solution, adjust the pH value to 12 with ammonia water, then add 1.1g of nano-platinum particles, Stir evenly, spin-coat the mixed solution on the upper and lower surfaces of the PVDF dielectric layer 10, rotate at a speed of 2000r / min, and take 1min. After curing, the first transition layer 31 and the second transition layer 32 with a thickness of 20nm are obtained, and then spin-coated The nano-platinum slurry is cured at a rotational speed of 2000 r / min for 1 min to obtain a first electrode layer 21 and a second electrode layer 22 with a thickness of 20 nm. Obtain a high-reliability piezoelectric flexible pressure sensor with a sensitivity of 0.2kpa -1 , the measurement range is 500MPa, the bonding force between the electrode layer and the base material is tested by the 100-grid method, and the bonding force bet...

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Abstract

A flexible pressure sensor and a preparation method thereof, the flexible pressure sensor includes a first electrode layer, a second electrode layer, a dielectric layer, a first transition layer disposed between the dielectric layer and the first electrode layer, and a first transition layer disposed between the dielectric layer and the first electrode layer. The second transition layer between the electrical layer and the second electrode layer, the first transition layer is made of a mixture of the first electrode layer material and the dielectric layer material, and the second transition layer is made of the second electrode layer material and the second transition layer material mixed. The flexible pressure sensor can make different materials have higher binding force, and improve the reliability of the pressure sensor.

Description

technical field [0001] The invention relates to the technical field of wearable sensors, in particular to a flexible pressure sensor and a preparation method thereof. Background technique [0002] Wearable sensors can realize continuous and non-invasive detection of various indicators of the human body, and are playing an increasingly important role in modern medical detection. For example, flexible pressure sensors can be introduced into clothing to monitor physiological signals such as heart rate and pulse, or pressure sensors can be added to shoes to monitor the user's plantar pressure, gait, and assess exercise status and injuries. [0003] Pressure sensors can be divided into resistive, capacitive and piezoelectric pressure sensors. Different types of sensors have different sensing principles, but the indicators for evaluating the performance of a sensor are the same, mainly including sensitivity, stability, linearity, Accuracy, resolution, range and hysteresis etc. A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/16G01L9/08
CPCG01L1/16G01L9/08
Inventor 冯雪王志建刘兰兰陈颖
Owner INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG