Device and method for growing two-dimensional material based on manner of push-and-pull cart

Abstract

The invention provides a device for growing a two-dimensional material based on the manner of a push-and-pull cart. The device comprises a reaction pipe, a furnace, the cart, a magnet, a first quartzboat, a second quartz boat, a substrate, an air inlet pipe and an air outlet pipe, wherein the reaction pipe is provided with an inlet end with an inlet flange, and an outlet end with an outlet flange; the furnace is arranged on the outer side of the reaction pipe, is close to one side of the outlet end, and is provided with an upstream port and a downstream port; the cart is provided with an armrod, is placed in the reaction pipe, and is close to one side of the inlet end; the magnet is arranged on the outer side of the reaction pipe and is arranged above the cart; the first quartz boat is placed in the reaction pipe, is connected with the arm rod, and is located on the upstream port of the furnace; the second quartz boat is located in the center of the furnace; the substrate is turned upside down onto the second quartz boat; one end of the air inlet pipe is connected with the inlet flange; the other end of the air inlet pipe is respectively connected with an Ar air inlet channel andan H2 air inlet channel; one end of the air outlet pipe is connected with the outlet flange; and the other end of the air outlet pipe is connected with an air extracting pump. The invention further provides a two-dimensional material preparation method adopting the device for growing the two-dimensional material based on the manner of the push-and-pull cart.

Description

technical field [0001] The invention belongs to the technical field of growing two-dimensional materials, and in particular relates to a device and method for growing two-dimensional materials based on a push-pull trolley. Background technique [0002] Two-dimensional (2D) materials are composed of a single layer or a few layers of atoms or molecules. The layers are connected by covalent bonds or ionic bonds with strong forces, and the layers are combined by van der Waals forces with weak forces. , has peculiar properties and functions because of its unique two-dimensional structure. In 2004, Geim's team obtained single-layer graphene by mechanical exfoliation, and studied its related properties, which triggered a research boom in two-dimensional materials, but the zero-band gap property limits the application of graphene in the field of electronics. While transition metal dichalcogenides (TMDCs, including MoS 2 、WSe 2 etc.) have extended two-dimensional materials beyond ...

AI Technical Summary

Problems solved by technology

In 2004, the Geim team obtained single-layer graphene by mechanical exfoliation, and studied its related properties, which triggered a research boom in two-dimensional materials, but the zero-bandgap property limits the application of graphene in the field of electronics

Although this method can compromise WSe 2 The growth temperature condition is a problem, but because the concentration of the precursor is mainly concentrated near the raw material boat in the center of the furnace, the concentration of the precursor reaching the downstream substrate has been greatly reduced, not only sacrificing the utilization rate of the raw material, but also difficult to achieve a better growth effect

In addition, there is another method by opening the high-temperature furnace cover after the constant temperature operation of the high-temperature furnace to exchange heat between the furnace tube and the room temperature, so that the material is rapidly cooled down to the growth temperature, but this cooling method cannot control the temperature drop rate, and in addition not safe enough

In summary, in order to solve the contradiction between the sublimation temperature and the growth temperature of the precursor, rapid cooling is an essential step for the growth of single-layer 2D materials with excellent quality, but there is currently no effective method to achieve rapid cooling

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