Method for measuring optical axis of aspheric reflector through cooperation of laser tracker and CGH

A laser tracker, aspherical technology, applied in the field of remote sensing, can solve the problems of unsatisfactory optical axis measurement accuracy and repeatability, easy to be affected by temperature and vibration, etc., to achieve low cost, controllable measurement error, and high measurement accuracy. Effect

Active Publication Date: 2020-04-28
BEIJING RES INST OF SPATIAL MECHANICAL & ELECTRICAL TECH
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  • Application Information

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Problems solved by technology

This method relies on the measurement accuracy and repeatability of three coordinates. When measuring large-aperture mirrors, the measurement process lasts for several hours and is easily affected by temperature and vibration. Therefore, the final optical axis measurement accuracy and repeatability are not ideal.

Method used

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  • Method for measuring optical axis of aspheric reflector through cooperation of laser tracker and CGH
  • Method for measuring optical axis of aspheric reflector through cooperation of laser tracker and CGH
  • Method for measuring optical axis of aspheric reflector through cooperation of laser tracker and CGH

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Embodiment

[0033] 1) The diameter of the aspheric mirror is Φ1500mm, and the curvature radius of the vertex is R 0 =4500mm, aspheric coefficient K=-0.9. According to this parameter, a CGH compensator is designed and processed to measure the surface shape of the aspheric mirror.

[0034] Design the optical path of CGH to measure the aspheric surface in zemax software. The CGH main holographic measurement area used for testing is Φ80mm, and the even-order coefficients of the binary optical polynomial parameters of CGH from the quadratic term to the decadal term are 3.216e+004 respectively. , -2.258e+004, 3.198e+004, -5.439e+004, 8.008e+004, all coefficients of odd order items are 0. The optical axis L2 of the CGH coincides with the optical axis L1 of the reflector, and the optical axis L1 of the reflector is perpendicular to the CGH. The theoretical wavefront error is less than λ / 10(PV) (λ=632.8nm). Test light path such as figure 1 . The actual processed CGH substrate is a 4-inch quart...

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Abstract

The invention discloses a method for measuring the optical axis of an aspheric reflector through cooperation of a laser tracker and a CGH. The method comprises the following steps: (1), providing a CGH compensator; (2), adjusting the optical axis of the CGH compensator to be coaxial with a rotary table of a center deviation measuring instrument on the center deviation measuring instrument; (3), keeping the position of the CGH compensator on the rotary table of the center deviation measuring instrument unchanged, measuring a rotary shaft of the center deviation measuring instrument by using a laser tracker, and measuring a relative position relationship between the optical axis of the CGH compensator and a first tracker target ball arranged at the corner of the CGH compensator; (4), building a test light path for measuring the surface shape of an aspheric reflector by the CGH compensator; and (5), arranging the laser tracker in the test light path, testing the positions of four first tracker target balls on the CGH compensator. The optical axis of the CGH compensator is reproduced through coordinate transformation of the laser tracker, and the optical axis of the CGH compensator isequivalent to the optical axis of the aspheric reflector in the test light path. Therefore, the measurement precision is improved.

Description

technical field [0001] The invention belongs to the technical field of assembly and testing of optical camera lenses in the field of remote sensing, and in particular relates to a method for measuring the optical axis of an aspheric mirror with a laser tracker and a CGH. Background technique [0002] In the field of optical remote sensing, in order to achieve good imaging performance, the tolerance allocation of optical lenses requires that the optical axes of each main optical element ensure a strict angular relationship, so the optical axis measurement of optical elements is required. However, the optical axis is not an entity, so it is difficult to measure it directly. In order to solve this problem, there are usually two solutions. One is to use an interferometer to test the surface shape of the mirror without aberration, and use a flat mirror of the same caliber as an auxiliary measurement optical element to strictly control the aberration in the measurement optical pat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02G01M11/00
CPCG01M11/005G01M11/0207G01M11/0271
Inventor 栗孟娟王兆明于秋跃王聪陈佳夷杜妍
Owner BEIJING RES INST OF SPATIAL MECHANICAL & ELECTRICAL TECH
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