Parameter calibration method and device for single-rotation compensator type spectral ellipsometer

A spectroscopic ellipsometer and rotational compensator technology, which is applied in the field of parameter calibration of a single-rotation compensator type spectroscopic ellipsometer, can solve the problems that the measurement accuracy cannot be guaranteed, and the system parameters cannot be calibrated.

Active Publication Date: 2020-05-08
WUHAN EOPTICS TECH CO LTD
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Problems solved by technology

[0007] The embodiment of the present invention provides a single-rotation compensator type spectroscopic ellipsometer parameter calibration method and device to solve the problem that the prior art cannot calibrate all system parameters after a single measurement, and the measurement accuracy cannot be guaranteed

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  • Parameter calibration method and device for single-rotation compensator type spectral ellipsometer
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  • Parameter calibration method and device for single-rotation compensator type spectral ellipsometer

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Embodiment Construction

[0051] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0052] Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, n...

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Abstract

The invention provides a parameter calibration method and device for a single-rotation compensator type spectral ellipsometer. The method comprises: taking a standard sample piece with any thickness as a sample piece to be detected; using a to-be-calibrated single-rotation compensator type spectral ellipsometer for measurement, performing Fourier analysis on a light intensity harmonic signal obtained through measurement, using a global fitting algorithm, and fitting a Fourier coefficient of the measured light intensity signal and a Fourier coefficient of a theoretical light intensity signal toobtain a calibration result of a first wavelength point system parameter; taking the calibration result of the system parameter of the previous wavelength point as the calibration initial value of the system parameter of the next wavelength point, and adopting a wavelength-by-wavelength fitting algorithm to obtain the system parameter calibration value of each wavelength point so as to obtain thesystem parameter of the full spectrum range. According to the method, based on global fitting, hundreds or thousands of wavelengths exist in a full spectrum participating in fitting, so that the calculated single-wavelength system parameter is very close to the true value of the system parameter.

Description

technical field [0001] Embodiments of the present invention relate to the field of system parameter calibration of precision optical measuring instruments, and in particular to a single-rotation compensator type spectroscopic ellipsometer parameter calibration method and device. Background technique [0002] As a kind of spectroscopic ellipsometer, the single-rotation compensator type spectroscopic ellipsometer uses a rotary compensator combined with a polarizing device to obtain a specific elliptically polarized light projected onto the surface of the sample to be measured, and measures the reflected light (or transmitted light) of the sample to be measured ) to obtain the polarization state change (including amplitude ratio and phase difference) of polarized light before and after reflection (or transmission), and then extract the information of the sample to be tested. [0003] The single-rotation compensator spectroscopic ellipsometer can be used for the analysis of opti...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/27G01N21/21G01B11/00
CPCG01N21/274G01N21/211G01B11/00G01B21/042G01N2021/213
Inventor 李伟奇陈军张传维郭春付刘世元
Owner WUHAN EOPTICS TECH CO LTD
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