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Superharmonic synchronous resonant accelerometer based on unidirectional electric synchronization

An accelerometer and resonant technology, which is applied in the field of superharmonic synchronous resonant accelerometers, can solve the problems of reducing the scale factor of the accelerometer and improving the performance of cancelling the synchronization effect, so as to achieve the effect of improving performance and realizing remote synchronization.

Active Publication Date: 2020-05-19
XI AN JIAOTONG UNIV
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Problems solved by technology

[0004] The existing acceleration detection device based on the 1:1 synchronization effect is used to measure the acceleration signal of low-frequency vibration, but the synchronization method through electrostatic coupling will lead to a decrease in the scale factor of the accelerometer, which partially offsets the performance improvement brought about by the synchronization effect

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  • Superharmonic synchronous resonant accelerometer based on unidirectional electric synchronization
  • Superharmonic synchronous resonant accelerometer based on unidirectional electric synchronization
  • Superharmonic synchronous resonant accelerometer based on unidirectional electric synchronization

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Embodiment Construction

[0035] In the description of the present invention, it should be understood that the terms "first" and "second" are used for description purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0036]In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the in...

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Abstract

The invention discloses a superharmonic synchronous resonant accelerometer based on unidirectional electric synchronization. Two resonance sensing modules of a MEMS resonant accelerometer are symmetrically arranged on two sides of a mass block module and are respectively connected with the mass block module through a lever mechanism module, and the MEMS resonant accelerometer introduces a vibration signal into an external high-frequency oscillator in the form of an electric signal to form super-harmonic synchronization. Within the synchronization bandwidth, the high-frequency resonator multiply amplifies the frequency offset of the MEMS resonant accelerometer. According to the invention, the problem of scale factor reduction caused by the interaction between coupled oscillators is solved,and the advantage of the super-harmonic synchronization effect on the performance improvement of the whole machine is brought into full play. Meanwhile, when the two oscillators are synchronous, the noise of the sensitive beam oscillation circuit is greatly suppressed, and the frequency stability is greatly improved. The performance indexes of the resonant accelerometer are optimized from the aspects of improving sensitivity, improving resolution, reducing noise and the like.

Description

technical field [0001] The invention belongs to the technical field of acceleration measurement, and in particular relates to a superharmonic synchronous resonant accelerometer based on one-way electrical synchronization. Background technique [0002] MEMS accelerometers have many advantages such as small size, light weight, low power consumption, low cost and reliable performance. As the core components of inertial navigation systems, MEMS accelerometers have been widely used in consumer electronics, medical equipment, aerospace and defense industries In recent years, it has occupied the low-end field and is gradually entering the high-end field of strategic precision. With the continuous development of my country's society and economy, especially the continuous investment in emerging industries such as the Internet of Things, artificial intelligence and big data in recent years, my country will have a huge demand for high-performance MEMS accelerometers in the future. Due...

Claims

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Application Information

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IPC IPC(8): G01P15/097G01P15/08
CPCG01P15/097G01P15/0802G01P2015/0862
Inventor 韦学勇徐柳王曙东蒋庄德
Owner XI AN JIAOTONG UNIV
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