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A Superharmonic Synchronous Resonant Accelerometer Based on Unidirectional Electrical Synchronization

An accelerometer, resonant technology, applied in the field of superharmonic synchronous resonant accelerometer, can solve the problems of reducing the scale factor of the accelerometer, canceling the synchronization effect and improving the performance, and achieving the effect of improving the performance

Active Publication Date: 2021-05-28
XI AN JIAOTONG UNIV
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Problems solved by technology

[0004] The existing acceleration detection device based on the 1:1 synchronization effect is used to measure the acceleration signal of low-frequency vibration, but the synchronization method through electrostatic coupling will lead to a decrease in the scale factor of the accelerometer, which partially offsets the performance improvement brought about by the synchronization effect

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  • A Superharmonic Synchronous Resonant Accelerometer Based on Unidirectional Electrical Synchronization
  • A Superharmonic Synchronous Resonant Accelerometer Based on Unidirectional Electrical Synchronization
  • A Superharmonic Synchronous Resonant Accelerometer Based on Unidirectional Electrical Synchronization

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[0035] In the description of the present invention, it should be understood that the terms "first" and "second" are used for description purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0036]In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the in...

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Abstract

The invention discloses a super-harmonic synchronous resonant accelerometer based on one-way electrical synchronization. Two resonant sensing modules of the MEMS resonant accelerometer are symmetrically arranged on both sides of the mass block module, and the two resonant sensing modules of the MEMS resonant accelerometer are symmetrically arranged on both sides of the mass block module. The module is connected, and the MEMS resonant accelerometer introduces the vibration signal into the external high-frequency oscillator in the form of an electrical signal and forms a super-harmonic synchronization. Within the synchronous bandwidth, the high-frequency resonator multiplies the frequency offset of the MEMS resonant accelerometer. The invention solves the problem of the decrease of the scale factor caused by the interaction between the coupled oscillators, and fully utilizes the advantage of the super-harmonic synchronous effect in improving the performance of the whole machine. At the same time, when the two oscillators are synchronized, the noise of the sensitive beam oscillation circuit will be greatly suppressed, and the frequency stability will be greatly improved. The performance indicators of the resonant accelerometer are simultaneously optimized in terms of improving sensitivity, improving resolution, and reducing noise.

Description

technical field [0001] The invention belongs to the technical field of acceleration measurement, and in particular relates to a superharmonic synchronous resonant accelerometer based on one-way electrical synchronization. Background technique [0002] MEMS accelerometers have many advantages such as small size, light weight, low power consumption, low cost and reliable performance. As the core components of inertial navigation systems, MEMS accelerometers have been widely used in consumer electronics, medical equipment, aerospace and defense industries In recent years, it has occupied the low-end field and is gradually entering the high-end field of strategic precision. With the continuous development of my country's society and economy, especially the continuous investment in emerging industries such as the Internet of Things, artificial intelligence and big data in recent years, my country will have a huge demand for high-performance MEMS accelerometers in the future. Due...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/097G01P15/08
CPCG01P15/0802G01P15/097G01P2015/0862
Inventor 韦学勇徐柳王曙东蒋庄德
Owner XI AN JIAOTONG UNIV
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