Space extreme ultraviolet photometer
An extreme ultraviolet light and extreme ultraviolet technology, applied in the field of extreme ultraviolet optical devices, can solve the problems of inability to accurately measure brightness, inability to detect extreme ultraviolet targets, and lack of high suppression ratio, etc., and achieve the effect of light weight, simple structure and small volume
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[0026] The space EUV photometer provided by the present invention, the specific embodiment is as follows:
[0027] The space extreme ultraviolet photometer provided by the present invention comprises: light entrance thin-film filter (plated the filter of 150nm Al film), the optical system that two EUV narrow-band multilayer reflectors 1,2 form, reflector The heavy metal baffle plate on the back, and the photodiode detector coated with thin film; the schematic diagram of its optical path can be found in figure 1 .
[0028] The thin film filter at the light entrance can preliminarily filter out the far ultraviolet, ultraviolet and visible light signals outside the working band, and at the same time play a role in temperature control to reduce the internal temperature.
[0029] figure 2 It is the transmittance curve of the metal thin film filter at the light entrance (150nm Al film). It can be seen from the figure that the filter is used to filter part of the X-ray radiation ...
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