Ion source device capable of preventing ion bombardment

Abstract

The invention relates to the technical field of ion sources, in particular to an ion source device capable of preventing ion bombardment. The ion source device comprises a shell, magnets, a magnetic conductive piece, an anode piece, a graphite cathode, a first pole shoe and a second pole shoe. A first groove is formed in the shell, a first pole shoe is arranged in the first groove, the magnets arearranged at the two ends of the first pole shoe and attached to the inner wall of the first groove. The magnetic conductive part is arranged in a second groove formed by the first pole shoe and the magnet, the anode part is arranged in an inner cavity of the magnetic conductive part, the second pole shoe is arranged on a bearing platform formed by the magnetic conductive part and the magnet, thegraphite cathode wraps the second pole shoe, and the graphite cathode is used for preventing electrons emitted from the anode part from bombarding the second pole shoe. Thus, when the ions bombard theproduct under the acceleration of the anode, the graphite cathode can prevent the ions emitted from the anode piece from bombarding the second pole shoe, so that the second pole shoe is effectively protected, and meanwhile, the pollution to the environment is avoided.

Description

technical field [0001] The invention relates to the technical field of ion sources, in particular to an ion source device for preventing ion bombardment. Background technique [0002] The ion source is a device that ionizes neutral atoms or molecules and draws an ion beam from it. It is an indispensable component in various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam implanters in controlled fusion devices. [0003] The traditional ion source is that the magnet forms a magnetic field surface through the pole piece to capture electrons and bombard the inert gas, thereby generating plasma. During the process of ion bombardment of the product under the acceleration of the anode, the pole piece will be etched by the ion beam. In this way, it cannot Effectively protect the pole piece, but also cause pollution to the environment. Contents of the invention [0004] T...

AI Technical Summary

Problems solved by technology

[0003] The traditional ion source is that the magnet forms a magnetic field surface through the pole piece to capture electrons and bombard the inert gas, thereby generating plasma. During the process of ion bombardment of the product under the acceleration of the anode, the pole piece will be etched by the ion beam. In this way, it cannot Effectively protect the pole piece, but also cause pollution to the environment

Images