Manufacturing method of optical waveguide multi-microchannel chip based on cmos image sensing
A manufacturing method and optical waveguide technology, applied to chemical instruments and methods, radiation control devices, laboratory containers, etc., can solve the problems of high cost and bulky, and achieve the effect of improving portability and reducing the adjustment of collection optical paths
Active Publication Date: 2021-11-30
SHANGHAI IND U TECH RES INST
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[0007] In order to solve a series of new requirements such as miniaturization, mobility and integration of modern biochemical analysis instruments, which are bulky and costly and meet the needs of the era of precision medicine
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[0035] The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0036] In the drawings, for convenience of description, the dimensional ratios of layers and regions are not actual ratios. When a layer (or film) is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. Further, when a layer is referred to as being "under" another layer, it can be directly under, and one or more intervening layers may also be present. In addition, when a layer is referred to as being between two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. The same reference numerals denote the same elements throughout. In addition, when two components are referred to as "connected", it includes physical connection, unless explicitly defined in the specification, suc...
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Abstract
The invention provides a method for manufacturing an optical waveguide multi-microchannel chip based on CMOS image sensing, comprising providing a CMOS image sensing layer, forming a lower cladding layer on the CMOS image sensing layer; A waveguide layer is formed on the top; an optical waveguide is formed with the waveguide layer; an upper cladding layer is formed on the waveguide layer; the optical waveguide is used to guide light into the micro-flow channel along the horizontal direction; the micro-flow channel is exposed The CMOS image sensing layer. Beneficial effects: form an integrated matrix structure of optical waveguides and multi-microfluidic channels, achieve higher-throughput analysis performance than traditional optical systems through multi-microfluidic channels and large-scale matrixed optical waveguides, and quickly build high-throughput The chip-level optical detection and analysis system for biological samples realizes high-throughput chips for biological detection at the micro-nano scale; it reduces the preparation work such as adjusting the collection optical path in the experiment, and improves the portability of the detection system.
Description
technical field [0001] The invention relates to a method for manufacturing an optical waveguide multi-microchannel chip based on CMOS image sensing, in particular to a method for manufacturing an optical waveguide multi-microchannel biological detection chip based on CMOS image sensing. Background technique [0002] In modern biochemical analysis processes, high-throughput detection equipment has been widely used. Most of these devices use biochips based on microfluidic technology or microwell arrays, loaded in high-performance optical systems, to realize the analysis of biological samples of different sizes such as nucleic acids, proteins, viruses, bacteria, cells, etc. The design of these optical systems is usually based on complex geometric optics, which are bulky, expensive, require optical alignment, and require high maintenance costs. [0003] In the era of precision medicine, miniaturized, high-performance, low-cost and mobile integrated analysis systems have receive...
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IPC IPC(8): B01L3/00H01L27/146
CPCB01L3/502707B01L2300/0654B01L2300/12B01L2300/168H01L27/14643
Inventor 陈昌刘博豆传国
Owner SHANGHAI IND U TECH RES INST