A high-efficiency processing method and device for diamond micropowder
A technology of diamond micropowder and processing method, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of inability to eliminate micropowder impurities and the like
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specific Embodiment approach 1
[0057] (1) Close the vacuum valve between the plasma processing chamber and the heating tube cavity and the cooling tube cavity, and place the molybdenum sample holder containing diamond micropowder on the deposition platform. Slowly feed argon as the main atmosphere, and open the chamber for vacuum suction, and slowly evacuate to a chamber pressure of 900Pa and maintain it. Set the excitation power at 600W and turn on the microwave power to excite the plasma. (2) Slowly feed hydrogen in an amount of 10% of the amount of argon, and oxygen in an amount of 1% of the amount of argon into the processing chamber. Gradually increase the microwave power to 1.5kW, adjust and control the cavity pressure at 7kPa, and make the temperature of the diamond powder reach 600°C. (3) Turn on the ultrasonic generator located at the lower part of the deposition table to promote the vibration and mutual collision of the diamond powder, and apply a negative bias voltage of -150V to the deposition ...
specific Embodiment approach 2
[0059] (1) Close the vacuum valve between the plasma processing chamber and the heating tube cavity and the cooling tube cavity, and place the molybdenum sample holder containing diamond micropowder on the deposition platform. Slowly feed argon gas as the main atmosphere, and open the chamber for vacuum suction, and slowly evacuate to the chamber pressure at 1kPa and maintain it. Set the excitation power at 700W and turn on the microwave power to excite the plasma. (2) Slowly feed hydrogen in an amount of 30% of the amount of argon gas, and oxygen in an amount of 5% of the amount of argon gas into the processing chamber. Gradually increase the microwave power to 3kW, adjust and control the chamber pressure at 15kPa, and make the temperature of the diamond powder reach 800°C. (3) Turn on the ultrasonic generator located at the lower part of the deposition table to promote the vibration and mutual collision of the diamond powder, and apply a negative bias voltage of -200V to th...
specific Embodiment approach 3
[0061](1) Close the vacuum valve between the plasma processing chamber and the heating tube cavity and the cooling tube cavity, and place the molybdenum sample holder containing diamond micropowder on the deposition platform. Slowly feed argon gas as the main atmosphere, and open the chamber for vacuum pumping, and slowly evacuate to a chamber pressure of 1.2kPa and maintain it. Set the excitation power at 700W and turn on the microwave power to excite the plasma. (2) Slowly feed hydrogen in an amount of 50% of the amount of argon gas, and oxygen in an amount of 5% of the amount of argon gas into the processing chamber. Gradually increase the microwave power to 4kW, adjust and control the chamber pressure at 20kPa, and make the temperature of the diamond powder reach 900°C. (3) Turn on the ultrasonic generator located at the lower part of the deposition table to promote the vibration and mutual collision of the diamond powder, and apply a negative bias voltage of -300V to the...
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