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Separation method of high-purity electronic-grade hexafluoropropane isomer

A technology of isomers and hexafluoropropane, which is applied in the field of separation of high-purity electronic grade hexafluoropropane isomers, can solve the problems of separation, small differences in structure and boiling point, etc., and achieves high directional purification depth, Stable process performance and high production efficiency

Active Publication Date: 2020-06-19
天津绿菱气体有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] In view of this, the present invention aims to propose a method for separating isomers of high-purity electronic grade hexafluoropropane to solve the difference in structure and boiling point between different isomers in the purification of hexafluoropropane in the prior art Very small, the technical problem that it is difficult to separate it by conventional cryogenic rectification

Method used

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  • Separation method of high-purity electronic-grade hexafluoropropane isomer
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  • Separation method of high-purity electronic-grade hexafluoropropane isomer

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Embodiment 1

[0044] A method for separating isomers of high-purity electronic grade hexafluoropropane, comprising the steps of:

[0045] S1: Pass the raw material into the water washing tower for water washing and deacidification;

[0046] S2: Pass the washed raw material into the adsorption tower for dehydration, and the adsorption material in the adsorption tower is 3A adsorbent;

[0047] S3: Pass the dehydrated raw material into the catalytic conversion tower, the form of the catalytic conversion tower is a fixed bed reactor, the surface active component of the catalyst filled therein is platinum, the loading content is 0.2wt%, and the carrier is alumina, The silicon-aluminum ratio of the carrier is 5; the gas space velocity of the catalytic conversion tower is 50h -1 , the specific surface area is 200m 2 / g, the catalytic conversion temperature is 400°C, and the catalytic conversion pressure is 0.2 MPa.

[0048] S4: Rectification to remove other impurities. The rectification tower s...

Embodiment 2

[0050] A method for separating isomers of high-purity electronic grade hexafluoropropane, comprising the steps of:

[0051] S1: Pass the raw material into the water washing tower for water washing and deacidification;

[0052] S2: Pass the washed raw material into the adsorption tower for dehydration, and the adsorption material in the adsorption tower is 4A adsorbent;

[0053] S3: Pass the dehydrated raw material into the catalytic conversion tower, the form of the catalytic conversion tower is a fixed bed reactor, the surface active component of the catalyst filled therein is platinum, the loading content is 0.3wt%, and the carrier is alumina, The silicon-aluminum ratio of the carrier is 5; the gas space velocity of the catalytic conversion tower is 80h -1 , the specific surface area is 300m 2 / g, the catalytic conversion temperature is 450°C, and the catalytic conversion pressure is 0.2 MPa.

[0054] S4: Rectification to remove other impurities. The rectification tower s...

Embodiment 3

[0056] A method for separating isomers of high-purity electronic grade hexafluoropropane, comprising the steps of:

[0057] S1: Pass the raw material into the water washing tower for water washing and deacidification;

[0058] S2: Pass the washed raw material into the adsorption tower for dehydration, and the adsorption material in the adsorption tower is 4A adsorbent;

[0059] S3: Pass the dehydrated raw material into the catalytic conversion tower. The catalytic conversion tower is in the form of a fixed bed reactor. The surface active component of the catalyst filled in it is platinum, the loading content is 0.5wt%, and the carrier is alumina thin stone , the silicon-aluminum ratio of the carrier is 8; the gas space velocity of the catalytic conversion tower is 100h -1 , the specific surface area is 350m 2 / g, the catalytic conversion temperature is 480°C, and the catalytic conversion pressure is 0.2 MPa.

[0060] S4: Rectification to remove other impurities. The rectifi...

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Abstract

The invention provides a separation method of a high-purity electronic-grade hexafluoropropane isomer. The separation method comprises the following steps: S1, washing the isomer with water to removeacid; S2, performing adsorption dehydration; S3, converting the isomer into a specified structure through catalytic conversion; and S4, rectifying the isomer to remove other impurities, wherein a catalytic conversion tower is used in the step S3, the form of the catalytic conversion tower is a fixed bed reactor, the surface active component of a catalyst filling the reactor is platinum, and the loading capacity is 0.2-0.8 wt%. The separation method disclosed by the invention has the characteristics of high production efficiency, high directional purification depth and stable process performance.

Description

technical field [0001] The invention belongs to the field of hexafluoropropane purification, in particular to a method for separating high-purity electronic-grade hexafluoropropane isomers. Background technique [0002] High-purity electronic grade 1,1,1,3,3,3-hexafluoropropane, the structural formula is Molecular formula is C 3 h 2 f 6 , code-named HFC-236fa, is the only fluorocarbon specialty gas with an F / C ratio of 2 among saturated three-carbon alkane electronic chemicals. C 3 h 2 f 6 As a new generation of plasma etching gas, due to its unique chemical structure, it has superior safety, etching rate, selectivity and sidewall characteristics, and has attracted high attention in recent years, such as US patents: US20170365487A1, US6361705B1. [0003] C 3 h 2 f 6 The gas belongs to saturated alkanes, its chemical properties are relatively inert, it has excellent stability and extremely low toxicity, and it is also a kind of aerospace fire extinguishing agent th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C17/358C07C17/38C07C17/383C07C17/389C07C17/395C07C19/08B01J23/42B01J29/068
CPCC07C17/358C07C17/38C07C17/383C07C17/389C07C17/395B01J23/42B01J29/068B01J2229/18C07C19/08
Inventor 马建修靖宇杨振建吴祥虎
Owner 天津绿菱气体有限公司
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