Two-stage heat-exchanging precise temperature control system

Abstract

The invention discloses a two-stage heat-exchanging precise temperature control system. The two-stage heat-exchanging precise temperature control system comprises a primary-stage heat exchanger and asecondary-stage heat exchanger, wherein the primary-stage heat exchanger and the secondary-stage heat exchanger are connected in series in a first circulating fluid side and are connected in parallelin a second circulating fluid side; a first circulating fluid and a second circulating fluid are subjected to heat exchange in the primary-stage heat exchanger to be primarily adjusted, and are subjected to heat exchange in the secondary-stage heat exchanger to be finely adjusted; by adjusting a factory affair water flow regulating valve, the temperature precision of the second circulating fluid is controlled, thereby ensuring the accuracy of the first circulating fluid temperature control precision to be up to minus or plus 0.01 DEG C; and meanwhile, the two stages of heat exchangers are arranged separately, so that the universality is high, and the special requirements of the first circulating fluid is met.

Description

technical field [0001] The invention relates to a semiconductor temperature control system, in particular to a two-stage heat exchange precision temperature control system. Background technique [0002] Huangguang is a process in the semiconductor industry where wafers such as silicon wafers are coated with glue, soft-baked, exposed, developed, and hard-baked to make a certain pattern. The yellow light area refers to the photolithography area in a TFT factory or a semiconductor factory, including photoresist coating, exposure, development and etching processes. The yellow light process refers to the protection of the bottom layer by the photosensitive substance (also known as photoresist or photoresist) coated on the glass surface after exposure and development, and then etched and stripped. The process of obtaining a permanent graphic. [0003] The accuracy and stability of the yellow light process is the key that directly affects the product quality. In order to ensure ...

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Problems solved by technology

[0004] Existing temperature control equipment uses a single-stage heat exchanger. Due to its low heat exchange efficiency and the limitation of the space size of the machine, it is difficult to enlarge the heat exchange area of ​​the heat exchanger, resulting in unsatisfactory temperature control accuracy and seriously affecting The effect of the yellow light process

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