Vertical movement device

Abstract

The invention discloses a vertical movement device. The device comprises a cam assembly, a motor assembly and a motion platform; the cam assembly comprises a cam stator and a cam rotor, wherein the cam stator is connected with the motor assembly, a driving surface with variable height is arranged at the top of the cam stator, the cam rotor is matched with the cam stator and connected with the moving platform, and the motor assembly moves to drive the cam stator to rotate so as to drive the cam rotor to roll along the driving surface, so that the moving platform is driven to move vertically. The vertical movement device adopts a direct drive mode, so transmission links are reduced, the vertical movement speed is increased, and the response speed is high.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a vertical motion device. Background technique [0002] In recent years, with the continuous improvement of the integration of large-scale integrated circuit devices, the precision and productivity requirements of the workpiece table have been continuously improved, especially the running speed, acceleration, performance and load capacity of the vertical module movement, which are constantly improving year by year. , such as lithography equipment, probe station detection field. The probe station is mainly used in the semiconductor industry, the optoelectronic industry, the quality test of integrated circuits and components, etc.; therefore, the probe station not only has high requirements for the accuracy and efficiency of the vertical movement module, but also requires the ability to withstand the Needle gauge pressure. Therefore, the demand for a vert...

AI Technical Summary

Problems solved by technology

However, there are also problems such as complex structure and many transmission links, and there are problems such as difficulty in coordinating the driving load and vertical motion speed.

[0005] In some literatures, the structure of the motor and cylinder is used, although the transmission link is reduced and the structure is relatively simple, but the pressure control of the cylinder is more complicated, which increases the difficulty of the design of the motion table

[0006] Therefore, there is a need for a new precision vertical motion table at this stage, which can not only solve the problems of traditional precision vertical motion table with complex structure and many transmission links, but also realize the characteristics of driving large vertical load, fast motion speed, and easy control

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