Integrated structure of crystal resonator and control circuit, and integration method thereof
A technology of crystal resonator and control circuit, which can be used in circuits, semiconductor devices, electric solid devices, etc., and can solve the problems of large size and difficult integration.
Inactive Publication Date: 2020-07-07
NINGBO SEMICON INT CORP
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Problems solved by technology
[0005] The purpose of the present invention is to provide an integration method of a crystal resonator and a control circuit, so as to solve the problem that the existing crystal resonator has a large size and is not easy to integrate
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[0050] The core idea of the present invention is to provide an integrated structure of a crystal resonator and a control circuit and a form integration method thereof. Both the crystal resonator and the semiconductor chip are integrated on a device wafer formed with a control circuit through a semiconductor planar process. On the one hand, the device size of the formed crystal resonator can be further reduced; on the other hand, the crystal resonator can be integrated with other semiconductor components to improve the integration degree of the device.
[0051] The integrated structure and integrated method of the crystal resonator and control circuit proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and us...
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The invention provides an integrated structure of a crystal resonator and a control circuit, and an integration method thereof. A lower cavity is formed in a device wafer on which a control circuit isformed, and a piezoelectric resonance piece is formed on the front surface of the device wafer; and a sealing cover layer is formed by using a semiconductor plane process so as to cover the piezoelectric resonance piece in the upper cavity to form the resonator. Moreover, the semiconductor chip can be further bonded to the back surface of the same device wafer, so that the integration level of the crystal resonator is further improved, and parameters of the on-chip modulation crystal resonator are realized. Compared with a traditional crystal resonator, the crystal resonator has the advantages that the size is smaller, the power consumption of the crystal resonator can be reduced, the crystal resonator can be integrated with other semiconductor components more easily, and therefore the integration degree of the device can be improved.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to an integrated structure of a crystal resonator and a control circuit and an integrated method thereof. Background technique [0002] Crystal resonators are resonant devices made using the inverse piezoelectric effect of piezoelectric crystals. They are key components of crystal oscillators and filters. They are widely used in high-frequency electronic signals to achieve accurate timing, frequency standards, and filtering. An essential frequency control function in signal processing systems. [0003] With the continuous development of semiconductor technology and the popularization of integrated circuits, the size of various components tends to be miniaturized. However, the current crystal resonator is not only difficult to integrate with other semiconductor components, but also the size of the crystal resonator is large. [0004] For example, currently common crystal res...
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IPC IPC(8): H03H9/205H03H3/02H10N39/00
CPCH03H9/205H03H3/02H03H2003/021H03H9/1014H03H9/0557H10N39/00H10N30/875H10N30/072H10N30/06H03H9/0547H03H9/1042H03H9/19
Inventor 秦晓珊
Owner NINGBO SEMICON INT CORP