A kind of manufacturing method of mems structure
A manufacturing method and vibration direction technology, applied in the direction of sensors, electrostatic transducers, microphones, electrical components, etc., can solve the problems that restrict the development of MEMS piezoelectric microphones, low sensitivity of piezoelectric MEMS structures, and easy warping of diaphragms, etc. Achieve the effects of reducing process difficulty, improving performance and improving sensitivity
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[0031] The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in this application belong to the protection scope of this application.
[0032] see figure 1 , according to an embodiment of the present application, a MEMS structure is provided, which can be but not limited to be used in sensors such as microphones or microphones, or other actuators. In some embodiments, the MEMS structure includes a substrate 10 and a piezoelectric composite vibration layer 20 .
[0033] see figure 2 , the substrate 10 includes an outer ring body 11 and a support plate 12 disposed inside the outer ring body 11 and connected to the outer ring body 11 , wherein a cavit...
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