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A vacuum target station system

A vacuum and target station technology, applied in vacuum evaporation coating, coating, sputtering coating, etc., can solve the problems of inability to increase target cooling efficiency and low production efficiency

Active Publication Date: 2021-01-22
LANZHOU UNIVERSITY +1
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  • Description
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Problems solved by technology

[0002] The existing vacuum target station systems used in scientific research fields such as nuclear medicine and biomedicine are mainly based on the structure of the vacuum chamber and the overall disassembly of equipment, which has low production efficiency and requires a large number of vacuum target systems. The cooling system of the target system is basically Using the entire vacuum chamber as a closed cooling system does not increase the cooling efficiency of the target itself on the basis of equal energy consumption.

Method used

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Embodiment Construction

[0025]The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments:

[0026]CombineFigure 1-Figure 4, A vacuum target station system, including target structure 5, cooling system 8, transmission system 9, vacuum structure 1 and support and adjustment system 4; the support and adjustment system are used to support and install the target structure, cooling system, and transmission system And vacuum structure.

[0027]The target structure 5 includes a target surface structure 6 and a target base structure 7, which form a closed space;

[0028]The vacuum structure 1 includes a vacuum pump, a collimator 3 and a vacuum chamber 2. The collimator is installed in the vacuum chamber 2 to adjust the size and range of the beam. The vacuum pump is used for vacuuming the vacuum chamber 2, and the target surface structure 6 is located The front end of the vacuum chamber 2 forms a closed vacuum space with the vacu...

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Abstract

The invention discloses a vacuum target station system, and particularly relates to the technical field of irradiation vacuum target station equipment. The vacuum target station system comprises a target structure, a cooling system, a transmission system, a vacuum structure and a support and adjusting system, the target structure comprises a target surface structure and a target base structure which form a closed space, the vacuum structure comprises a vacuum pump, a collimator and a vacuum cavity, the collimator is installed in the vacuum cavity and used for adjusting the size and the range of a beam, the vacuum pump is used for vacuumizing the vacuum cavity, and the target surface structure is located at the front end of the vacuum cavity and forms a closed vacuum space together with thevacuum cavity; the cooling system is connected with the target base structure to form the closed-loop cooling system to complete circulating cooling of the target surface structure; the transmissionsystem is connected with the target base structure for assembling and disassembling the target structure and replacing the target surface structure; and the beam enters the vacuumized vacuum cavity and bombards the target surface structure, and after production is completed, a vacuum pump is used for releasing pressure.

Description

Technical field[0001]The invention relates to the technical field of irradiation vacuum target station equipment, in particular to a vacuum target station system.Background technique[0002]The existing vacuum target station systems used in scientific research fields such as nuclear medicine and biomedicine are mainly based on the structure of the vacuum chamber and the overall disassembly of the equipment. The production efficiency is low, and the number of vacuum target systems required is large. The cooling system of the target system is basically Using the entire vacuum chamber as closed cooling does not increase the cooling efficiency of the target body on the basis of equal energy consumption.Summary of the invention[0003]The purpose of the present invention is to solve the above-mentioned shortcomings and propose a vacuum target station system that generates corresponding products according to beam lines such as ions and neutrons input from the front end and bombards materials ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/32
CPCC23C14/32C23C14/3407
Inventor 刘志毅秦芝刘军涛吴晓蕾钱湘萍贾欢陈岱远袁辰彰朱定军
Owner LANZHOU UNIVERSITY
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