Method for improving MCP channel coating gain stability by ALD, ALD-MCP and application of ALD-MCP
A stability and channel technology, which is applied to the electrode device of multiple dynodes, dynodes, electron multiplier tubes, etc., and can solve the problems of ALD-MCP gain instability and gain instability.
Active Publication Date: 2020-08-07
NORTH NIGHT VISION TECH
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Problems solved by technology
[0008] In the prior art, the ALD-MCP prepared by preparing an aluminum oxide film layer on the traditional MCP has a very obvious improvement in gain and life, but there are also certain problems correspondingly: ALD-MCP will have insufficient gain In a stable situation, in the vacuum device, it is specifically manifested in the initial operation, the gain will increase with the increase of the working time, the gain of the single-chip micro-channel plate will increase by more than 50%, and the increase of the superimposed gain of the double-chip micro-channel plate will also exceed 30%, after a long period of work to reach a stable state of gain, this phenomenon is also called "positive memory effect" in imaging applications
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[0029] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.
[0030] Aspects of the invention are described in this disclosure with reference to the accompanying drawings, which show a number of illustrated embodiments. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of numerous ways, since the concepts and embodiments disclosed herein are not limited to any implementation. In addition, some aspects of the present disclosure may be used alone or in any suitable combination with other aspects of the present disclosure.
[0031] combine Figure 3-4 As shown, in the scheme of the exemplary embodiment of the present invention, a kind of method t...
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The invention relates to the technical field of MCPs, and provides a method for improving MCP channel coating gain stability by ALD, an ALD-MCP and application of the ALD-MCP. On the basis of a functional layer of the MCP, before an Al2O3 film layer is deposited by utilizing an ALD technology, a pretreatment layer is manufactured to realize transition between the Al2O3 film layer and an MCP substrate silicon-rich layer; and then the Al2O3 film layer is deposited through the ALD technology on the basis of the pretreatment layer. Thus, due to the fact that the pretreatment layer is used as a transition between the Al2O3 film layer deposited by ALD and the MCP substrate silicon-rich layer, interface defect charges are avoided, and the gain stability of the ALD-MCP is improved.
Description
Technical field [0001] The invention relates to the technical field of micro-channel plates, and specifically to a method of using ALD to improve the gain stability of MCP channel coatings, using atomic layer deposition technology (ALD) on the basis of conventional micro-channel plates (MCP). The new ALD-MCP prepared above solves the problem of unstable gain. Background technique [0002] Microchannel Plate (MCP) is composed of many (10 4 ~10 7 ) is a compact two-dimensional array composed of Channeltron electron multipliers (CEM). Each channel is a channel electron multiplier with a functional layer capable of emitting secondary electrons on the inner wall. When the MCP is in working condition, a certain voltage (hundreds to thousands of volts) is applied to both ends, and an electric field distributed along the axial direction of the channel will be formed inside the channel. Low-energy particles (electrons, electrons, etc.) from the outside incident into the microchanne...
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Login to View More IPC IPC(8): C23C16/455C23C16/40C23C16/02H01J9/02H01J43/24
CPCC23C16/0272C23C16/403C23C16/45527H01J9/02H01J43/246
Inventor 邱祥彪孙建宁张正君丛晓庆司曙光任玲王兴超李婧雯乔芳建王鹏飞
Owner NORTH NIGHT VISION TECH