A kind of semiconductor processing equipment
A processing equipment and semiconductor technology, which is applied in semiconductor/solid-state device manufacturing, heating element materials, metal material coating technology, etc., can solve the problems of limited production capacity of semiconductor processing equipment, and achieve reduced processing time and high uniformity , the effect of reducing the failure rate
Active Publication Date: 2021-09-17
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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[0004] The invention discloses a semiconductor processing equipment, which can solve the problem of limited productivity increase of the semiconductor processing equipment
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[0027] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0028] The technical solutions disclosed by various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0029] Please refer to Figure 2 to Figure 6 , the embodiment of the present invention discloses a semiconductor processing equipment, the disclosed semiconductor processing equipment includes ...
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The invention discloses a semiconductor processing equipment. The disclosed semiconductor processing equipment includes an auxiliary heater, a main heating part, a wafer carrying part and a quartz tube, wherein: the main heating part is arranged around the outer peripheral wall of the quartz tube, and the auxiliary heater is at least partly and the wafer carrying part are all arranged in the quartz tube; the auxiliary heater includes an insulating sleeve, an insulating support tube, an anti-oxidation resistance wire and an insulating head; the anti-oxidation resistance wire is at least partly wound around the outer circumference of the insulating support tube, and A heating zone is formed on the top, the heating zone and the insulating support tube are both arranged in the insulating sleeve, the insulating head is arranged at the nozzle of the insulating sleeve, and the two ends of the anti-oxidation resistance wire pass through the insulating head. The above solution can solve the problem of limited increase in production capacity of semiconductor processing equipment.
Description
technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a semiconductor processing equipment. Background technique [0002] Photovoltaic power generation system is a new type of power generation system that uses the "photovoltaic effect" of solar cell semiconductor materials to directly convert solar radiation energy into electrical energy. Solar cells, also known as photovoltaic cells, are the core devices in photovoltaic power generation systems. At present, the solar cell with the most mature technology, commercial value and widest application in the market is the crystalline silicon solar cell. The reflection loss rate of sunlight on the surface of crystalline silicon is as high as about 35%, which seriously affects the final conversion efficiency of solar cells. In order to improve the conversion efficiency, that is, reduce the reflection of sunlight on the surface of crystalline silicon and increase the ref...
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IPC IPC(8): H01L21/67C23C16/46H05B3/12
CPCC23C16/46H01L21/67115H01L21/67248H05B3/12
Inventor 郝晓明郑建宇侯鹏飞赵福平
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD